Method for machining single-tip cone of cathode emitter through laser

A cathode emission and laser processing technology, applied in the field of material processing, can solve problems such as poor environmental protection and low efficiency, and achieve the effects of high-efficiency processing, controllable curvature radius, and pollution-free processing.

Active Publication Date: 2020-02-18
AVIC BEIJING AERONAUTICAL MFG TECH RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the single-tip cone cathode emitter materials include tungsten, zirconium, metal oxide, carbon fiber and lanthanum hexaboride, etc. The processing methods of the single-tip cone cathode emitter mainly include wet corrosion method, high-temperature oxygen ion corrosion method, electrochemical corrosion method, etc. However, there are certain limitations in the environmental protection of the processing process, processing efficiency, and processing control of the curvature radius of the tip of the cone.
For example, compared with other methods, although the electrochemical corrosion method can prepare a single-tip cone cathode emitter with a small radius of curvature and a better surface finish, it requires several hours of electrochemical corrosion time, and the efficiency is low and the process is environmentally friendly. poor

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  • Method for machining single-tip cone of cathode emitter through laser
  • Method for machining single-tip cone of cathode emitter through laser

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Experimental program
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Effect test

Embodiment 1

[0024] This embodiment provides a method for processing single-tip cones of lanthanum hexaboride cathode emitters by laser, which can prepare single-tip cones of lanthanum hexaboride cathode emitters with a radius of curvature in submicron order, and the radius of curvature can be controlled. Including the following steps:

[0025] (1) Femtosecond laser (240fs, 800nm) beam 1 is focused by focusing lens 2 (f=100mm) to form a focused beam 3;

[0026] (2) Install the lanthanum hexaboride cathode emitter 4 (φ10mm×50mm) on the rotatable movement device 5, the rotatable movement device 5 has a two-dimensional rotation mechanism, which can realize the high-speed rotation movement of the lanthanum hexaboride cathode emitter 4 And the angle adjustment between the lanthanum hexaboride cathode emitter 4 and the focused beam 3;

[0027] (3) The rotational speed of the rotatable motion device 5 is set at 100 r / min, and the rotatable motion device 5 is adjusted so that it is 30° to the cen...

Embodiment 2

[0030] This embodiment provides a laser machining method for a tungsten cathode emitter single-tip cone, which can prepare a lanthanum hexaboride cathode emitter single-tip cone with a radius of curvature at the submicron level, and the radius of curvature can be controlled. Including the following steps:

[0031] (1) After the picosecond laser (3fs, 1030nm) beam 1 is focused by the focusing lens 2 (f=150mm), a focused beam 3 is formed;

[0032] (2) Install the tungsten cathode emitter 4 (φ10mm×40mm) on the rotatable motion device 5, the rotatable motion device 5 can realize the high-speed rotary motion of the tungsten cathode emitter 4, and set the rotational speed of the rotatable motion device 5 to 200r / min;

[0033] (3) The focused beam 3 has a tilting and rotating function, and the tilting angle of the focused beam 3 is adjusted so that its central axis and the rotation axis of the tungsten cathode emitter 4 are 45°;

[0034] (4) Using the focused beam 3 to remove materi...

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Abstract

The invention provides a method for machining a single-tip cone of a cathode emitter through laser. The method comprises the following steps of (1) forming a focused beam after a laser beam is focusedby a focusing mirror; (2) mounting the cathode emitter on a rotatable moving device; (3) enabling the cathode emitter and the rotatable moving device to do rotational movement along a same rotating shaft; and (4) enabling the center line of the focused beam and the cathode emitter in the rotational movement to move by a certain angle until the center line of the focused beam and the cathode emitter in the rotational movement are close, and enabling the center line of the focused beam and the cathode emitter in the rotational movement to be in contact at the focus of the focused beam, and removing a cathode emitter material through laser to realize the machining of the single-tip cone of the cathode emitter. Compared with a wet etching method, a high temperature oxygen action ion etching method and an electrochemical corrosion method, the method can synchronously realize the efficient machining of the single-tip cone of the cathode emitter in the field emitting process of tungsten, zirconium, metallic oxides, lanthanum hexaboride and the like, the radius of curvature is controllable, and the machining process is pollution-free.

Description

technical field [0001] The invention belongs to the technical field of material processing, and in particular relates to a method for processing a cathode emitter single-tip cone by laser. Background technique [0002] Single pointed cone cathode emitter is a common field emission cathode, which is used in scanning electron microscope, electron beam lithography system and electron beam exposure system, etc. In the process of field emission, high field strength is more conducive to the emission of electrons. In order to obtain a strong field, the most common method is to process the cathode emitter into a tapered structure, and the radius of curvature of the tip of the cathode emitter cone should be submicron. Reduce the operating voltage of the cathode. At present, the single-tip cone cathode emitter materials include tungsten, zirconium, metal oxide, carbon fiber and lanthanum hexaboride, etc. The processing methods of the single-tip cone cathode emitter mainly include wet...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23K26/36B23K26/064B23K26/08
CPCB23K26/36B23K26/0648B23K26/0823
Inventor 张伟张晓兵蔡敏李元成纪亮焦佳能
Owner AVIC BEIJING AERONAUTICAL MFG TECH RES INST
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