A method of laser processing a single-pointed cone of a cathode emitter

A cathode emission and laser processing technology, which is applied in the field of material processing, can solve the problems of poor environmental protection and low efficiency, and achieve the effects of high-efficiency processing, controllable curvature radius, and no pollution in the processing process

Active Publication Date: 2022-03-04
AVIC BEIJING AERONAUTICAL MFG TECH RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

At present, the single-tip cone cathode emitter materials include tungsten, zirconium, metal oxide, carbon fiber and lanthanum hexaboride, etc. The processing methods of the single-tip cone cathode emitter mainly include wet corrosion method, high-temperature oxygen ion corrosion method, electrochemical corrosion method, etc. However, there are certain limitations in the environmental protection of the processing process, processing efficiency, and processing control of the curvature radius of the tip of the cone.
For example, compared with other methods, although the electrochemical corrosion method can prepare a single-tip cone cathode emitter with a small radius of curvature and a better surface finish, it requires several hours of electrochemical corrosion time, and the efficiency is low and the process is environmentally friendly. poor

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  • A method of laser processing a single-pointed cone of a cathode emitter
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Effect test

Embodiment 1

[0024] This embodiment provides a method for processing single-tip cones of lanthanum hexaboride cathode emitters by laser, which can prepare single-tip cones of lanthanum hexaboride cathode emitters with a radius of curvature in submicron order, and the radius of curvature can be controlled. Including the following steps:

[0025] (1) Femtosecond laser (240fs, 800nm) beam 1 is focused by focusing lens 2 (f=100mm) to form a focused beam 3;

[0026] (2) Install the lanthanum hexaboride cathode emitter 4 (φ10mm×50mm) on the rotatable movement device 5, the rotatable movement device 5 has a two-dimensional rotation mechanism, which can realize the high-speed rotation movement of the lanthanum hexaboride cathode emitter 4 And the angle adjustment between the lanthanum hexaboride cathode emitter 4 and the focused beam 3;

[0027] (3) The rotational speed of the rotatable motion device 5 is set at 100 r / min, and the rotatable motion device 5 is adjusted so that it is 30° to the cen...

Embodiment 2

[0030] This embodiment provides a laser machining method for a tungsten cathode emitter single-tip cone, which can prepare a lanthanum hexaboride cathode emitter single-tip cone with a radius of curvature at the submicron level, and the radius of curvature can be controlled. Including the following steps:

[0031] (1) After the picosecond laser (3fs, 1030nm) beam 1 is focused by the focusing lens 2 (f=150mm), a focused beam 3 is formed;

[0032] (2) Install the tungsten cathode emitter 4 (φ10mm×40mm) on the rotatable motion device 5, the rotatable motion device 5 can realize the high-speed rotary motion of the tungsten cathode emitter 4, and set the rotational speed of the rotatable motion device 5 to 200r / min;

[0033] (3) The focused beam 3 has a tilting and rotating function, and the tilting angle of the focused beam 3 is adjusted so that its central axis and the rotation axis of the tungsten cathode emitter 4 are 45°;

[0034] (4) Using the focused beam 3 to remove materi...

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Abstract

A kind of method that the present invention provides by laser machining cathode emitter single pointed cone, comprises the following steps: (1) after laser beam is focused by focusing mirror, form focused beam; (2) cathode emitter is installed on the rotatable movement device above; (3) the cathode emitter and the rotatable movement device rotate along the same rotation axis; (4) the centerline of the focused light beam and the cathode emitter in the rotational movement move at a certain angle and come into contact with the focal point of the focused light beam, using Laser removal of cathode emitter material to achieve single-tip machining of cathode emitters. Compared with the wet etching method, the high-temperature oxygen action ion etching method, and the electrochemical etching method, the method of the present invention can simultaneously realize the efficient processing of single-point cones of field emission cathode emitters such as tungsten, zirconium, metal oxides, and lanthanum hexaboride. , and the radius of curvature is controllable, and the processing process is pollution-free.

Description

technical field [0001] The invention belongs to the technical field of material processing, and in particular relates to a method for processing a cathode emitter single-tip cone by laser. Background technique [0002] Single pointed cone cathode emitter is a common field emission cathode, which is used in scanning electron microscope, electron beam lithography system and electron beam exposure system, etc. In the process of field emission, high field strength is more conducive to the emission of electrons. In order to obtain a strong field, the most common method is to process the cathode emitter into a tapered structure, and the radius of curvature of the tip of the cathode emitter cone should be submicron. Reduce the operating voltage of the cathode. At present, the single-tip cone cathode emitter materials include tungsten, zirconium, metal oxide, carbon fiber and lanthanum hexaboride, etc. The processing methods of the single-tip cone cathode emitter mainly include wet...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B23K26/36B23K26/064B23K26/08
CPCB23K26/36B23K26/0648B23K26/0823
Inventor 张伟张晓兵蔡敏李元成纪亮焦佳能
Owner AVIC BEIJING AERONAUTICAL MFG TECH RES INST
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