A kind of high-efficiency silica sol polishing liquid not easy to crystallize and easy to clean and preparation method thereof
A technology of polishing liquid and silica sol, which is applied in the field of ultra-precision surface polishing materials, and can solve problems such as easy drying and crystallization, and difficult cleaning of workpieces
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[0038] Correspondingly, as the preparation method of the above-mentioned high-efficiency silica sol polishing liquid that is not easy to crystallize and is easy to clean, the preparation method comprises the following steps:
[0039] S1: Weigh 5-15 parts by weight of a water-soluble carrier, add it to 60-100 parts by weight of deionized water, then add 20-50 parts by weight of a silicon oxide polishing agent, and stir and mix evenly;
[0040] S2: Add 3-8 parts by weight of a complexing agent, stir evenly, and finally add 1-5 parts by weight of an oxidant, adjust the pH value to 8-9, and stir well to obtain the high-efficiency silica sol that is not easy to crystallize and easy to clean Polishing fluid.
[0041] The sulfonated melamine formaldehyde resin of the present invention has excellent wetting and dispersing properties, reduces the amount of deionized water added in the polishing solution, thereby ensuring that the silica sol crystallizes and absorbs the polishing soluti...
Embodiment 1
[0046] The high-efficiency silica sol polishing solution that is not easy to crystallize and easy to clean in this embodiment is composed of the following raw materials in parts by weight: 30 parts by weight of a silicon oxide polishing agent, 10 parts by weight of a water-soluble carrier that reduces the volatility of the polishing solution , 5 parts by weight of a complexing agent for cleaning, 3 parts by weight of an oxidizing agent and 60 parts by weight of deionized water.
[0047] The silicon oxide polishing agent is added to the polishing solution in the form of nanocomposite particles with a core-shell structure. The core-shell nanocomposite particles are silicon dioxide in the core and sulfonated melamine formaldehyde resin in the shell.
[0048] The water-soluble carrier is a composition of glycerol and polymer polyol with a mass ratio of 3:1.
[0049] The nitrogen-containing organic small molecule complexing agent is nitroxide free radical piperidinol.
[0050] The...
Embodiment 2
[0052] The high-efficiency silica sol polishing solution that is not easy to crystallize and easy to clean in this embodiment is composed of the following raw materials in parts by weight: 20 parts by weight of a silicon oxide polishing agent, and 5 parts by weight of a water-soluble carrier that reduces the volatility of the polishing solution 3 parts by weight of complexing agent for cleaning, 1 part by weight of oxidant and 50 parts by weight of deionized water.
[0053] The silicon oxide polishing agent is added to the polishing solution in the form of nanocomposite particles with a core-shell structure. The core-shell nanocomposite particles are silicon dioxide in the core and sulfonated melamine formaldehyde resin in the shell.
[0054] The water-soluble carrier is a composition of diethylene glycol and polymer polyol with a mass ratio of 2.5:1.
[0055] The nitrogen-containing organic small molecule complexing agent is a composition of hydroxymethoxy 4-methylphenyl-nitr...
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