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a porous worm 3 Preparation method, product and application of electrochromic thin film

An electrochromic and thin film technology, applied in electrolytic coating, surface reaction electrolytic coating, vacuum evaporation coating, etc., can solve the problem of oxidation voltage and oxidation time remaining on the surface of the film, the influence of electrochromic film performance oxidation time, and film oxidation. Excessive and other problems, to achieve the effect of color change reaction, porosity and pore size controllable, fast coloring and fading

Active Publication Date: 2022-02-01
LIAONING NORMAL UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] However, tungsten trioxide in thin film form has disadvantages such as long response time and low discoloration efficiency due to its small specific surface area.
In order to overcome the shortcomings of long response time and low discoloration efficiency caused by the small specific surface area of ​​tungsten trioxide in thin film form, people have tried to prepare WO with a porous structure. 3 Electrochromic thin film, the methods of preparing porous tungsten oxide thin film reported so far are mainly anodic oxidation method and sol-gel method
The anodic oxidation method can obtain a tungsten oxide film with a uniform distribution of pores on the surface, but the anodic oxidation method prepares WO 3 The performance of the electrochromic film is seriously affected by the oxidation voltage and oxidation time. If the oxidation voltage is too high or the oxidation time is too long, it is easy to cause the film to be over-oxidized. To develop in depth
This leads to the preparation of WO with excellent performance by anodic oxidation 3 Electrochromic thin films present great difficulties

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0028] (1) Select ITO transparent conductive glass as the substrate, ultrasonically clean it in acetone, absolute ethanol, and deionized water for 10 minutes, then dry it with high-pressure nitrogen, and place it on the sample stage of the magnetron sputtering vacuum chamber. A tungsten target with a purity of 99.99% was used as the sputtering target.

[0029] (2) Vacuum the background to 10 -3 Pa; Introduce high-purity argon gas with a flow rate of 12 sccm, and adjust the working pressure to 1.0 Pa; after the gas flow is stable, start the tungsten sputtering target, control the sputtering power by adjusting the sputtering current of the tungsten target, and set the sputtering power to Set at 50W, block the substrate with a baffle and start pre-sputtering for 20 minutes, then remove the baffle and start depositing a metal W film. After 50 minutes of deposition, a metal W film is obtained on the ITO transparent conductive glass, and turn off the power of the tungsten sputtering...

Embodiment 2

[0033] Same as Example 1, the difference is that 20V DC voltage is directly used for pole oxidation for 50min.

Embodiment 3

[0035] Same as Example 1, the difference is that after the first stage and the second stage of anodic oxidation, they are ultrasonically cleaned with absolute ethanol and deionized water for 10 minutes and then taken out.

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PUM

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Abstract

The invention discloses a porous WO 3 The preparation method, product and application of the electrochromic thin film, first prepare a layer of dense metal tungsten film on the surface of the cleaned substrate by magnetron sputtering, and then place the substrate with the metal tungsten film on the The anodic oxidation is carried out in stages in the electrolyte containing fluorine ions, and after each anodic oxidation is completed, the prepared oxide film is thoroughly cleaned and corroded with an ultrasonic cleaning solution, and a porous WO with a mesoporous structure is finally prepared. 3 The electrochromic thin film has a higher specific surface area and higher light transmittance, and has extremely wide applications in electrochromic materials.

Description

technical field [0001] The invention relates to the technical field of functional thin films, in particular to a porous WO 3 The preparation method and product of electrochromic thin film and its application. Background technique [0002] Tungsten trioxide (WO 3 ) is a very promising electrochromic material that can be used in electrochromic glasses. Under the external electric field, the optical properties of the electrochromic glass undergo continuous and reversible changes, thereby selectively absorbing or reflecting external heat radiation and preventing internal heat diffusion, saving the building's air conditioning costs in summer and heating costs in winter, and adjusting indoor lighting. and temperature, while ensuring a view of the outdoor viewing. In addition to being used in buildings, electrochromic glass can also be used in vehicles such as cars, trains, planes and ships, as well as other areas that involve adjusting light, such as car roofs, train side windo...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/18C23C14/35C23C14/58C25D11/26
CPCC23C14/185C23C14/35C23C14/5853C23C14/5806C25D11/26C25D11/024
Inventor 张敏文帅孙钏洲宫瑞
Owner LIAONING NORMAL UNIVERSITY