44 results about "Tungsten target" patented technology

The invention discloses a preparation method of a gradient film containing tungsten oxide and silicon nitride. The method comprises the following steps: selecting a substrate and cleaning the substrate; vacuumizing to basic vacuum, introducing high-purity argon and oxygen, starting to sputter a tungsten target, and depositing a uniform tungsten oxide layer; the titanium target is sputtered at low frequency, meanwhile, the sputtering frequency of the tungsten target is gradually reduced, when the sputtering frequency of the tungsten target is reduced to 0, the sputtering frequency of the titanium target reaches the highest value, nitrogen is started to be introduced, the silicon target is sputtered at low frequency, the sputtering frequency of the silicon target is gradually increased, and the sputtering frequency of the titanium target is gradually reduced; when the sputtering frequency of the titanium target is reduced to 0, the sputtering frequency of the silicon target reaches the highest value, and independent sputtering of the silicon target is carried out; and annealing and polishing the gradient film. The titanium element is added, so that the gradient film is of a three-element structure, the strength of the gradient film can be effectively enhanced, and the overall quality of the gradient film is improved.

The utility model discloses a beam detection device and an electron accelerator, the electron accelerator comprises an accelerating tube, a magnetic lens and a tungsten target, the magnetic lens is arranged at an electron beam outlet of the accelerating tube, and the beam detection device is arranged between the magnetic lens and the tungsten target. The beam detection device comprises a fixing body, an electronic receiving piece, a conductor piece, an insulating piece, a detection circuit and a control circuit, a through hole is formed in the fixing body, the electronic receiving piece is fixed to the periphery of the through hole through the insulating piece and connected with the conductor piece, a plurality of connecting holes are formed in the side face of the fixing body, and the detection circuit is connected with the control circuit. The conductor piece penetrates through the connecting hole to be connected with the detection circuit, the detection circuit transmits a detection signal to the control circuit, and the control circuit transmits a control signal to the magnetic lens. According to the utility model, the electron accelerator can be improved, so that the electron accelerator has the function of detecting the offset of the electron beam, the current of the magnetic lens can be adjusted, and the efficiency of the electron accelerator is improved.

The invention belongs to the technical field of nuclear physics and particle accelerators, and relates to a high-precision wide-energy-spectrum neutron source target body structure applied to a spallation neutron source device. The method comprises the following steps: a tungsten target is adopted, and a 6cm thin target design is adopted; the cooling layer contains boron water and the like and can be used for cooling and slowing down neutrons; the moderation layer moderates the neutron energy spectrum to a thermal neutron energy region by using boron-containing water; the shielding layer is made of low-carbon steel and concrete to ensure radiation safety; the tail end of the neutron channel is connected with an experimental terminal; according to the thin target design, the energy resolution is improved, the energy resolution of neutrons below 100 keV is higher than 0.1%, and the energy resolution of neutrons below 1 MeV reaches 0.3%; the boron element reduces the gamma ray background; and the five neutron pore channels meet various requirements. The overall design realizes the effect required by the high-precision neutron experiment and improves the precision of the device.

The invention provides a preparation method of a zirconium-coated tungsten target for a hash neutron source, and the preparation method comprises the following steps: assembling a first C-shaped zirconium sheet, a second C-shaped zirconium sheet and a tungsten target, and enabling the zirconium sheet to completely coat the tungsten target to obtain an assembly; and the assembly is placed in a sheath, degassing and hot isostatic pressing treatment are conducted in sequence, and the zirconium-coated tungsten target for the hash neutron source is obtained after the sheath is removed. The zirconium-coated tungsten target prepared by the preparation method has the advantages of high mechanical strength, few welding defects and long service life, and can be used as a stable spallation neutron source.

The invention relates to a consolidated abrasive particle grinding pad and a grinding method for tungsten materials, and relates to the technical field of surface machining, the consolidated abrasive particle grinding pad comprises an abrasive particle layer; the abrasive particle layer comprises the following components in percentage by mass: 35-45% of silicon carbide particles, 8-15% of ceramic particles and the balance of resin. According to the fixed abrasive particle grinding pad provided by the invention, through the design of the abrasive particle layer in the grinding pad, when a tungsten material is machined, a good machining effect can be achieved, and the specular reflectance of a tungsten target material obtained after machining is larger than or equal to 92.8% and can reach 96.8% or above in a preferable scheme.

To provide a sputtering system and a film deposition method capable of depositing a low-resistance tungsten film.SOLUTION: The sputtering apparatus includes a substrate stage 2 for holding a substrate Sw in a vacuum chamber 1 in which a target 3 made of tungsten is installed, and a high-frequency power supply Hs for supplying high-frequency power to the substrate stage 2. When a first plasma atmosphere Pm1 is generated in a vacuum chamber 1 and sputtered particles are stuck and deposited on a substrate Sw by sputtering a target 3 to form a tungsten film, high-frequency power is supplied to a substrate stage 2 to generate a second plasma atmosphere Pm2, and positive ions in the first plasma atmosphere Pm1 are also made to collide with the substrate Sw. A ratio of an anode area to a cathode area is set in a range of 4.0 to 6.0, where the cathode area is an area of the substrate holding surface 2a of the substrate stage 2, and the anode area is a surface area in the vacuum chamber 1 functioning as one of the electrodes of the substrate stage 2 and the other of the electrodes of the second plasma atmosphere Pm2.SELECTED DRAWING: Figure 1

The application belongs to the technical field of alloy materials, and specifically discloses a tungsten target composite material and a preparation method thereof, which comprises the following steps: (1) adding spherical tungsten powder, spherical titanium powder, sodium carboxymethyl cellulose and polyvinyl alcohol into water, ball-milling and uniformly mixing to obtain a first mixed solution; (2) adding carbon nanotubes and amino silane coupling agent into a nitric acid solution, uniformly stirring to obtain a second mixed solution; (3) uniformly mixing the first mixed solution, flaky molybdenum disulfide powder and the second mixed solution, ultrasonic treatment, and drying to obtain a precursor; and (4) performing degreasing and sintering on the precursor to obtain the tungsten target composite material. The tungsten target composite material has excellent electrical conductivity and mechanical properties, and has a wide application prospect.

This invention provides a tungsten sputtering target and its preparation method, relating to the field of magnetron sputtering target preparation technology. The preparation method includes first loading tungsten powder into a casing; then performing vacuum hot pressing sintering on the casing filled with tungsten powder. During vacuum hot pressing sintering, the casing isolates the tungsten powder from the carbon atmosphere, preventing the introduction of impurity elements, and simultaneously achieving degassing, sealing, and sintering of the tungsten powder in the casing; followed by hot isostatic pressing. The casing is made of a metal with a melting point higher than 2000℃ that does not chemically react with tungsten. Before vacuum hot pressing sintering, this invention uses a metal casing to fill the tungsten powder, which not only improves the initial density and uniformity of the tungsten powder and increases the contact area between powder particles, thus improving sintering activity; it also prevents carbon elements from intruding into the blank, reducing carbon inclusions, improving the purity of the target material, lowering the sintering temperature and pressure, improving production efficiency, reducing energy consumption, and extending the service life of the mold.

The invention discloses a divertor target plate small-angle thermal load simulation device and detection method.The device comprises a discharge unit and an inflation unit arranged at one end of the discharge unit, the discharge unit comprises an insulation block, one end of the insulation block is provided with a first end cover, and the other end of the insulation block is provided with a second end cover; the first end cover, the insulating block and the second end cover are provided with first through holes along the axis, the first through holes are used for installing a copper-tungsten electrode, a first capillary tube, a second capillary tube, a first main electrode and a second main electrode which are connected in sequence, the first capillary tube comprises a first capillary tube accessory and a second capillary tube accessory, and a target groove is formed in the second capillary tube accessory and used for installing a tungsten target; the arrangement of the first gap, the second gap, the third gap and the fourth gap is used for preventing external gas or internal helium plasma from leaking from each connecting part, voltage is applied to the first end cover and the second end cover to break down the gas in the discharge channel, and helium plasma jet is formed under the pushing of pressure and the gas to impact the tungsten target at a small angle.

The invention provides a method for depositing a GLC film on the basis of the surface of a plastic workpiece through a PVD technology and the corresponding plastic workpiece. The method comprises the steps that S1, the plastic workpiece is subjected to ultrasonic cleaning and baking; s2, a chromium target, a tungsten target and a graphite target are washed through multi-arc ion plating magnetron sputtering coating equipment; s3, vacuumizing the placed plastic workpiece, and introducing argon to open a chromium target to form a metal chromium layer; s4, starting a chromium target and a tungsten target for introducing argon to form a metal chromium-tungsten layer; s5, argon and nitrogen are introduced for starting a bias power supply, a chromium target and a tungsten target are started, and a chromium tungsten nitride layer is formed; s6, turning on a bias voltage power supply, turning off nitrogen, turning on a chromium target, a tungsten target and a graphite target, and introducing argon and acetylene to adjust bias voltage, so as to form a multi-element nano multilayer film structure; s7, turning on a bias power supply, turning off the tungsten target, turning on the chromium target and the graphite target, and introducing argon and acetylene to form a GLC film layer; and S8, a target material power supply, acetylene, argon and a bias power supply are turned off, and the plastic workpiece is cooled.

The invention belongs to the technical field of magnetron sputtering target material manufacturing, and discloses a method for preparing and recycling a high-purity tungsten target material. According to the preparation and recovery method, used tungsten residual targets serve as raw materials, primary tungsten powder is obtained after mechanical crushing and ball milling, after crushing and ball milling, the primary tungsten powder reacts with fluorine gas at the high temperature to obtain low-purity tungsten hexafluoride with the purity of 2-4 N, and secondary tungsten powder with the purity larger than or equal to 7 N, the O content smaller than or equal to 300 ppm, impurity elements Fe, Ni, Cr, K and Mo smaller than or equal to 0.01 ppm and the average particle size smaller than or equal to 3 micrometers is obtained in a CVD deposition mode. And high-purity tungsten and tungsten alloy target materials can be prepared again by taking the tungsten powder as a raw material.

The invention provides a method for detecting the grain size of a tungsten target material. The detection method comprises the following steps: (1) carrying out first grinding and polishing treatment and second grinding and polishing treatment on a to-be-detected area of a tungsten target material to obtain a detected surface; (2) performing circumferential sealing and enclosing treatment on the detection surface to form a sealed detection chamber, then injecting etching liquid into the sealed detection chamber to perform etching treatment, and performing cleaning treatment and drying treatment to obtain a detection sample; the etching liquid comprises nitric acid, hydrofluoric acid and sulfuric acid; and (3) observing the metallographic structure of the detection sample by using a portable microscope. The tungsten target material with a smooth and flat interface can be obtained through simple grinding and polishing treatment, a crystal boundary diagram obtained after etching treatment is clear, and the grain size of the tungsten target can be conveniently detected; according to the detection method, different areas of the target material can be detected for multiple times, the overall uniformity of the target material can be effectively known, and local abnormal products are prevented from flowing into clients.

Provided in the present disclosure are an electro accelerator and a target cooling device thereof. The target cooling device comprises a body housing, a liquid inlet, a liquid outlet, a target material and an isolation sheet, wherein a mounting hole is provided in the middle of the body housing; a liquid-cooling cavity is provided inside the body housing; one end of the liquid-cooling cavity is connected to the liquid inlet, and the other end of the liquid-cooling cavity is connected to the liquid outlet; the target material and the isolation sheet are both arranged in the mounting hole, and the target material is arranged above the isolation sheet; and the liquid-cooling cavity comprises a gap between the target material and the isolation sheet. Provided in the present disclosure is a water-cooling heat dissipation mechanism for a target material, the mechanism improving the heat dissipation efficiency, taking away heat in a timely and effective manner, reducing the temperature of the target material, ensuring the efficiency and quality of X-ray generation, and making an apparatus operate more stably and safely. Furthermore, a tungsten target, a flange, a collimator and the heat dissipation structure are integrated into one device, such that the apparatus can have a simplified structure and is easily mounted.

The invention discloses an X-ray diffraction morphology instrument, and relates to the technical field of X-ray diffraction detection.The X-ray diffraction morphology instrument comprises a light source structure, a sample bearing structure and an X-ray detector, the sample bearing structure is used for bearing a sample, the light source structure comprises a light source and a capillary element, a tungsten target is adopted as a target material of the light source, and the capillary element is arranged on the light source; the light source is used for generating divergent X-ray light beams, the capillary element is used for gathering the X-ray light beams generated by the light source into focused light beams or collimated light beams and irradiating the focused light beams or collimated light beams onto a sample, and the X-ray detector is used for collecting diffraction imaging signals generated by the sample. The X-ray diffraction morphology instrument provided by the invention can efficiently test the X-ray diffraction morphology of the crystal.

The invention discloses a preparation method of a fine-grain high-density high-purity tungsten target material, which belongs to the technical field of target material preparation, and comprises the following steps: pressing tungsten powder into a blank; the blank is placed on a hollowed-out supporting plate, the blank is sintered into the tungsten porous part under the hydrogen atmosphere which is continuously supplied in a flowing mode, the blank is located on the upstream side of the supporting plate in the hydrogen supply direction and partially covers the hollowed-out through holes, and upstream hydrogen penetrates through the supporting plate from the uncovered through holes to circulate; sleeved hot isostatic pressing treatment is carried out on the tungsten porous part to obtain the tungsten target material, a sheath is provided with a contact layer making contact with a treated workpiece, and the material of the contact layer contains tantalum. Compared with the prior art, the tungsten target material can be sintered in the hydrogen atmosphere in the sintering process, the oxygen impurity content in the tungsten target material is reduced, and the purity of the tungsten target material is improved.

The application discloses a high-energy X-ray target, relates to the technical field of X-ray imaging and detection equipment, and comprises a tungsten target, a water cooling system and a double-layer filter, the front surface of the tungsten target is a receiving surface for receiving an electron beam, the back surface is a emitting surface for emitting an X-ray beam, the water cooling system comprises a cooling water pipe, the cooling water pipe is provided with a heat transfer surface which is attached to the edge of the tungsten target, the heat transfer surface is an arc surface along the length direction of the cooling water pipe and is a plane along the width direction, one end of the cooling water pipe is a cooling water inlet for feeding in cooling water, and the other end is a hot water outlet for discharging hot water, and the double-layer filter is opposite to the emitting surface of the tungsten target. Compared with the prior art, the application has more excellent cooling performance, the double-layer filter is arranged to harden the outgoing X-ray, the average energy is improved, and the X-ray detection precision is increased.

The invention provides a preparation method of a tungsten-copper composite film for a heat sink material. The preparation method comprises the following steps that a substrate is pretreated, and a tungsten target material and a copper target material are installed in a magnetron sputtering machine; respectively carrying out glow build-up, pre-sputtering and formal sputtering operations on the tungsten target material and the copper target material; and all the devices are closed, and the tungsten target material or the copper target material is taken out. According to the preparation method, the substrate is pretreated through a treatment method of a specific process, and the high-quality tungsten-copper composite film which is excellent in interface bonding and good in uniformity and compactness is prepared through a magnetron sputtering method. Compared with the prior art, the magnetron sputtering method disclosed by the invention has the outstanding advantages of low cost, high efficiency, high safety, good integrity of the obtained structure, high interface bonding strength and the like.

The invention relates to the field of sputtering targets for semiconductor manufacturing, and particularly provides a fine-grain tungsten target and a preparation method thereof.The preparation method comprises the steps that 1, halogenated alkane is pre-activated and then subjected to chemical vapor deposition with hydrogen and tungsten hexafluoride on a substrate, and a carbon-doped tungsten material is formed; and (2) the carbon-doped tungsten material is subjected to annealing treatment at the temperature of 1500-2100 DEG C, and the fine-grain tungsten target material is obtained. The preparation method is simple in process, and the prepared tungsten target material has high purity, high density and an equiaxed fine grain structure.

The invention discloses a compact high-stability ECR (electron cyclotron resonance) deuterium-deuterium neutron source device, and belongs to the technical field of accelerator neutron sources, the device is composed of an ECR ion source, a vacuum chamber and a target body system, and a vacuum pumping system, a high-voltage feed-in system, a microwave feed-in system, a circulating cooling system, a gas supply system and other multifunctional systems are integrated for cooperative work; the ECR ion source adopts three sets of permanent magnet structures to synergistically generate a uniform 875GS magnetic field, and meanwhile, the newly designed microwave window adopts a micro water channel structure and a tungsten target, so that heat deposited in the microwave window can be greatly reduced on the premise of not influencing microwave feed-in, and the service time of the microwave window is doubled; the target and extraction electrode integrated design is adopted, damage of electrons to peek and other insulating materials is reduced, the service life is prolonged, meanwhile, pure zirconium metal is used as the target material, and the deuterium adsorption capacity under the high-temperature condition is greatly improved. The device has the advantages of small size, long-time stable operation and the like.

The present invention provides a low-temperature permeation and plating integrated composite hardening insulation treatment method for titanium alloy surface, comprising the following steps: step 1, pickling and etching; step 2, placing the pickled and dried titanium alloy sample into a permeation and plating integrated composite treatment device, wherein the permeation and plating integrated composite treatment device is equipped with a high-energy pulse plasma power supply and a HIPIMS power supply; step 3, kilovolt bias sputtering, pre-injection of nitrogen ions or oxygen ions; step 4, high-power pulse ion nitriding or oxygenation treatment; step 5, sputtering to generate a TiWN-based primer layer: turning on a titanium target and a tungsten target, the titanium target and the tungsten target are controlled by a DC cathode, and a gradient multi-element TiWN coating is prepared by adjusting the ratio of Ti and W; step 6, sputtering to generate a TiWCN base surface layer. The nitriding or oxygenation strengthening operation of the titanium alloy sample substrate and the deposition of a high-hardness insulating coating are completed in the permeation and plating integrated composite treatment device, which can achieve permeation and plating integrated and efficient treatment. Moreover, the nitriding or oxygenation treatment is carried out at a relatively low temperature, and almost no deformation of the titanium alloy substrate occurs.

To provide a tungsten target in which provision of pores which may cause generation of particles is suppressed, and the size and distribution profile of the pores can be controlled at high precision, and a method for producing the tungsten target. The tungsten target is formed of a sintered product of a tungsten powder. The target has a relative density of 99% or higher, and the number of pores having a size of 0.01 μm2 or more and less than 0.2 μm2 is 20 or less; the number of pores having a size of 0.2 μm2 or more and less than 1.8 μm2 is 5 or less; and the number of pores having a size of 1.8 μm2 or more is 1 or less, when the target is observed in an observation field of 0.15 mm2.

The application discloses a diffusion welding method of a chemical vapor deposition tungsten target material and relates to the technical field of target material welding. The diffusion welding method comprises the following steps: providing two groups of tungsten target material assemblies; processing a sine wave tooth structure along a concentric circle on a tungsten plate welding surface of each group of tungsten target material assemblies; processing a second sine wave tooth structure along a spiral line on a back plate welding surface of each group of tungsten target material assemblies; coating a film on the welding surface of each back plate and each tungsten plate; providing a sheath assembly; placing the two groups of tungsten target material assemblies which are oppositely arranged along the thickness direction in a containing cavity, so that the back plates of the two groups of tungsten target material assemblies abut against each other, and an interval layer is arranged between the two back plates; and sequentially performing the following steps on the sheath assembly: pumping, sealing, and hot isostatic pressing diffusion welding, so as to obtain a tungsten target material. The diffusion welding method can guarantee the bonding strength of the welding interface and reduce the risk of cracking or fragmentation of the chemical vapor deposition tungsten target material in the diffusion welding process.

The invention provides a mirror surface grinding and polishing processing method of a tungsten target material and application of the mirror surface grinding and polishing processing method. The mirror surface grinding and polishing processing method comprises chemical mechanical grinding treatment and chemical mechanical polishing treatment which are carried out in sequence. The tungsten target material with a smooth and flat interface can be obtained through grinding-polishing treatment, the interface roughness is reduced to 0.10 [mu] m or below, a crystal boundary diagram obtained through corrosion is clear, and the grain size of the tungsten target can be conveniently detected.

The utility model discloses a coaxial direct-drive rotary radiation conversion target for high-energy X-rays, which comprises a tungsten target disc, a flange sleeve, a vacuum cavity shell, a motor mounting seat, a radiation-resistant motor, a magnetic fluid sealing shaft and a cooling assembly. The coaxial direct drive mode of the radiation-resistant motor and the tungsten target disc is adopted, and the coupling is further adopted for connection, so that vibration and noise caused by friction between two shafts during high-speed transmission are reduced, and the overall stability is improved; meanwhile, the radiation-resistant motor adopts the design of the hollow shaft, so that the requirement that the tungsten target disc needs to be provided with a cooling water path is met, the motor and a water cooler are arranged on the same side, and the space requirement of the whole conversion target is reduced.

The invention provides a high-hardness metal tungsten nanocrystalline film and a preparation method thereof. The preparation method comprises the following steps: cleaning a substrate; the dried substrate is fixed to the center position of a sample table capable of rotating in a two-dimensional mode and conveyed into a cavity through a sample conveying rod; high-purity argon is introduced into the chamber; meanwhile, applying negative bias voltage to the substrate so as to perform ion cleaning and etching on the surface of the substrate; heating the substrate on the sample table; continuously introducing high-purity argon into the chamber, and keeping the temperature of the substrate constant by adopting a high-purity metal tungsten target; then, applying negative bias voltage to the substrate, and coating the substrate by adopting a high-voltage magnetron sputtering technology to obtain a sample; and after coating is finished, vacuumizing the chamber to high vacuum, turning off a heating power supply in a high vacuum state, and taking out the sample through a sample transfer rod after the sample is cooled to room temperature. The method has the technical effects that the film layer quality is high, the uniformity is good, the film forming speed is high, the damage to the film layer is small, the coating thickness is controllable, and the grain size can be controlled.

The invention provides a sputtering device capable of forming a low-resistance tungsten film and a film forming method. The present invention is provided with: a substrate stage (2) for holding a substrate (Sw) in a vacuum chamber (1) in which a tungsten target (3) is provided; and a high-frequency power source (Hs) that applies high-frequency power to the substrate stage (2). When a first plasma atmosphere (Pm1) is generated in a vacuum chamber (1) and a tungsten film is formed by depositing sputtering particles on a substrate (Sw) by sputtering of a target (3), a second plasma atmosphere (P2) is generated by applying high-frequency power to a substrate stage (2), and positive ions in the first plasma atmosphere (Pm1) are also caused to collide with the substrate (Sw). The area of the substrate holding surface (2a) of the substrate stage (2) is set as the cathode area, the surface area in the vacuum chamber (1), which functions as one electrode of the substrate stage (2) and as the other electrode of the second plasma atmosphere (P2), is set as the anode area, and the ratio of the anode area to the cathode area is set to be in the range of 4.0-6.0.

The invention belongs to the technical field of dissimilar metal welding, and particularly relates to a zirconium-coated tungsten target material for a spallation neutron source and a preparation method of the zirconium-coated tungsten target material for the spallation neutron source, metal zirconium which is good in thermal conductivity, resistant to corrosion and small in after-heat and alloy of the metal zirconium are used as materials for coating tungsten so as to improve the thermal conductivity of the target material and prolong the service life of the target material. The preparation method sequentially comprises the steps of raw material primary processing, assembling, seal welding, hot isostatic pressing and the like. The tungsten target coated with the metal zirconium and the metal zirconium alloy prepared through the method has the advantages of being high in interface bonding strength, free of cracks, good in heat conductivity, small in after-heat, resistant to corrosion and the like, and the problems that a tantalum-coated tungsten target is difficult to cool and dissipate heat, the after-heat is serious, and a target body is damaged or destroyed due to the fact that cooling water is likely to evaporate can be solved.

The invention relates to a tungsten target material assembly and a preparation method thereof. The tungsten target material assembly sequentially comprises a tungsten target material, an aluminum middle layer and a back plate from top to bottom. The surface of the aluminum intermediate layer is provided with a porous oxide film. The porous oxidation film is arranged on the surface of the aluminum middle layer, the thickness of an element diffusion layer in tungsten and aluminum and the thickness of an element diffusion layer in aluminum and a back plate can be increased due to the existence of the porous oxidation film, the mechanical interlocking degree between every two adjacent layers is increased, and then the bonding strength of the tungsten target material assembly is improved.

A method for producing a radionuclide comprises irradiating a target material with a linear accelerator to produce a radionuclide, dissolving the irradiated target material comprising the radionuclide, and separating the radionuclide from the irradiated target material. The irradiated target material may be dissolved in an acidic solution comprising one or more mineral acids. The target material may include a tungsten target material, such as a natural tungsten target material comprising one or more of 180W, 182W, 183W, 184W, and 186W or a tungsten target material exhibiting an elemental purity of about 99.95%. Additional methods for producing tantalum radioactive isotopes are disclosed.

The embodiment of the application discloses large-size crack-free fine-grain high-purity tungsten sputtering target material and a preparation method thereof; the method comprises the following steps: S1, selecting high-purity tungsten powder raw material; the particle size range of the tungsten powder raw material is 0.47-1.89 mu m, D10=0.47 mu m, D50=1.07 mu m, D90=1.89 mu m, and Span=1.32; S2, the selected high-purity tungsten powder raw material is pretreated by using a glycerol-ethanol mixed solution, and dried to obtain pretreated tungsten powder; S3, the pretreated tungsten powder is cold isostatic pressing forming to obtain a tungsten green body; S4, the tungsten green body is vacuum pre-sintering to obtain a vacuum pre-sintering compact; S5, the vacuum pre-sintering compact is sealed in a niobium-based sheath to obtain a sealed compact body; S6, the sealed compact body is hot isostatic pressing sintering to obtain a tungsten target compact body; and S7, the tungsten target compact body is machined to obtain the large-size crack-free fine-grain high-purity tungsten sputtering target material.