The invention belongs to the technical field of MEMS
cantilever probe cards, and particularly relates to a probe
replacement method of a
cantilever probe card. The method comprises the steps that a clamping jaw clamps a probe body from the back of a probe, heating
laser irradiates the clamping position of the clamping jaw from the upper portion of the clamping jaw to the inclined lower portion,
laser spots are located in the area where the two clamping jaws are located, and
soldering tin is preset on the
welding face of a normal probe body used for replacement. The technical scheme provided by the invention has the following technical advantages: 1) the split type clamping jaw is adopted, so that the
processing difficulty and cost are reduced; (2) the heating position of a
laser spot is changed, the problem of
thermal deformation of a probe arm is avoided, the position of a clamping jaw is matched with the laser spot, and the influence of laser on an adjacent probe is shielded to the maximum extent; and (3) the
tin-containing probes are used for
welding, so that the problems that
tin cannot be supplemented due to the small distance between the adjacent probes after the probes are desoldered, and the tin amount is insufficient when the probes are planted are solved, the
welding spot strength is improved, and the welding strength and the
electrical stability of the maintenance position are improved.