Surface plasma enhanced fluorescence imaging sensor and measuring method thereof
An imaging sensor and surface plasmon technology, applied in the field of sensors and sensing, can solve the problems of sensor field enhancement coefficient and low fluorescence intensity signal, and achieve the effect of improving the field enhancement coefficient
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[0055] The structure of the waveguide-coupled long-range surface plasmon-enhanced fluorescent sensor with glass as the substrate and Teflon as the waveguide dielectric layer and the SPEF signal detection results. The preparation method of the WCLRSPR device is as follows: the ZF3 glass substrate layer is passed through ethanol with a volume ratio of 1:4 - Ultrasonic cleaning with ether mixture for 2 hours, after cleaning the surface, put it into an electron beam evaporation apparatus to evacuate to reduce the air pressure to 10-6 millitorr; use the evaporation rate of 0.01nm per second to evaporate gold material as the upper coating After layering, spin-coat Teflon at a speed of 3500 rpm as a dielectric layer with an adjustable refractive index, with a thickness of 3 microns; then put it into an electron beam evaporation apparatus to evacuate to reduce the air pressure to 10-6 millitorr, Evaporate silver material at an evaporation rate of 0.08nm per second as the lower metal co...
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