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A kind of flexible surface acoustic wave carbon dioxide gas sensor and preparation method thereof

A gas sensor and surface acoustic wave technology, applied in the field of sensors, can solve problems such as troublesome installation and easy damage of sensors, and achieve the effects of convenient operation, simple manufacturing process, and easy promotion

Active Publication Date: 2022-03-15
TIANJIN SINO GERMAN VOCATIONAL TECHNICAL COLLEGE
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the surface acoustic wave gas sensors currently used are usually made of piezoelectric crystals such as lithium niobate, lithium tantalate, and quartz. The installation is troublesome and the sensor is easily damaged.

Method used

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  • A kind of flexible surface acoustic wave carbon dioxide gas sensor and preparation method thereof
  • A kind of flexible surface acoustic wave carbon dioxide gas sensor and preparation method thereof
  • A kind of flexible surface acoustic wave carbon dioxide gas sensor and preparation method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0038] 1) Pretreatment of the flexible piezoelectric substrate layer: Take a 300 μm thick PVDF-TrFE (Piezotech) piezoelectric substrate and cut it into a geometric size of 35 cm×10 cm. Ultrasonic cleaning with absolute ethanol for 1min, deionized water for 30s, 0.02mol / L sodium hydroxide solution for 1min, deionized water for 3min, ultrasonic frequency 0.1KHz-80KHz, and dry with dry nitrogen for use.

[0039]2) Preparation of piezoelectric buffer layer: a Ta-ZnO piezoelectric buffer layer with a thickness of 0.1 μm was prepared on the surface of PVDF-TrFE by radio frequency magnetron sputtering. Put the PVDF-TrFE substrate into the sputtering chamber of the sputtering equipment, and evacuate the pressure of the sputtering chamber to 10 - 5 Pa, the target material is a sintered ceramic target doped with Ta and ZnO, wherein the mass fraction of Ta is 0.15%, and argon (99.99%) and oxygen (99.99%) are passed into, and the flow rate is adjusted so that the pressure in the sputteri...

Embodiment 2

[0046] 1) Pretreatment of the flexible piezoelectric substrate layer: take a PAN (Piezotech) piezoelectric substrate with a thickness of 500 μm, and cut it into a geometric size of 40 cm×10 cm. Ultrasonic cleaning with absolute ethanol for 1min, deionized water for 30s, 0.02mol / L sodium hydroxide solution for 1min, deionized water for 3min, ultrasonic frequency 0.1KHz-80KHz, and dry with dry nitrogen for use.

[0047] 2) Preparation of piezoelectric buffer layer: a Ta-ZnO piezoelectric buffer layer with a thickness of 0.08 μm was prepared on the surface of PAN by radio frequency magnetron sputtering. Put the PAN substrate into the vacuum chamber of the sputtering equipment, and evacuate the pressure of the vacuum chamber to 10 -5 Pa, the target material is a sintered ceramic target doped with Ta and ZnO, wherein the mass fraction of Ta is 0.1%, and argon (99.99%) and oxygen (99.99%) are passed through, and the flow rate is adjusted so that the pressure in the sputtering chambe...

Embodiment 3

[0052] 1) Pretreatment of the flexible piezoelectric substrate layer: Take a 200 μm thick β-PVDF (Piezotech) piezoelectric substrate and cut it into a geometric size of 5 cm×0.8 cm. Ultrasonic cleaning with absolute ethanol for 1min, deionized water for 30s, 0.01mol / L sodium hydroxide solution for 30s, deionized water for 3min, ultrasonic frequency 0.1KHz-80KHz, and dry with dry nitrogen for use.

[0053] 2) Preparation of piezoelectric buffer layer: a Ta-ZnO piezoelectric buffer layer with a thickness of 0.05 μm was prepared on the surface of β-PVDF by radio frequency magnetron sputtering. Put the β-PVDF substrate into the vacuum chamber of the sputtering equipment, and evacuate the pressure of the vacuum chamber to 10 -5 Pa, the target material is a sintered ceramic target doped with Ta and ZnO, wherein the mass fraction of Ta is 0.18%, and argon (99.99%) and oxygen (99.99%) are passed through, and the flow rate is adjusted so that the pressure in the sputtering chamber is 0...

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Abstract

The invention discloses a flexible surface acoustic wave carbon dioxide gas sensor and a preparation method thereof. Substrate composition. The advantages of the present invention are: the manufacturing process of the sensor is simple, the operation is convenient, the flexible characteristics allow the sensor to be conveniently pasted on various test points, the application environment and working conditions have great flexibility, the sensor has strong corrosion resistance, and Good intrusion, easy to promote.

Description

technical field [0001] The invention belongs to the technical field of sensors, and in particular relates to a flexible surface acoustic wave carbon dioxide gas sensor and a preparation method thereof. Background technique [0002] The excessive discharge of carbon dioxide gas will cause harm to the marine environment and human health. However, with the continuous improvement of the degree of social industrialization, the emission of carbon dioxide gas is still increasing year by year. This requires high-quality carbon dioxide gas sensors to monitor the concentration of carbon dioxide in people's living and production environments, and to give timely warnings of excessive emissions. [0003] Traditional carbon dioxide sensors mainly include solid dielectric type, capacitive type, chemical type and infrared absorption type. They are high in cost, large in size, complex in installation and maintenance, and cannot be promoted and used as civilian equipment. The surface acoust...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N29/02G01N29/036G01N29/22G01N29/24H01L41/08H01L41/22H10N30/00H10N30/01
CPCG01N29/022G01N29/222G01N29/036G01N29/2437G01N2291/02809H10N30/01H10N30/706
Inventor 徐晟张瑞韩健赵旭李扬崔俊鹏胡晓光
Owner TIANJIN SINO GERMAN VOCATIONAL TECHNICAL COLLEGE