A kind of anti-corrosion multi-component coating for high shielding parts, its preparation method and the device used in the preparation method

Abstract

The invention provides a high-shielding piece corrosion resistant multi-element coating and a preparation method thereof and a device used by the preparation method and belongs to the technical fieldof thin film deposition. The preparation method of the high-shielding piece corrosion resistant multi-element coating comprises the following steps of using a carbon-silicon target and a carbon-silicon-titanium target as a cathode; using a magnetic filtered deposition method, a multi-arc deposition method and a first high power pulse magnetic control method to alternately deposit a TiSiN film layer and a TiSiCN film layer in circulation on a high-shielding piece substrate to obtain a TiSiN / TiSiCN composite alternating layer; and using a second high power pulse magnetic control method to deposit an Al2O3 film layer on the surface of the TiSiN / TiSiCN composite alternating layer to obtain a high-shielding piece corrosion resistant multi-element coating. According to the high-shielding piece corrosion resistant multi-element coating and the preparation method thereof and the device used by the preparation method, through cooperation of the magnetic filtered deposition method, the multi-arcdeposition method and the first high power pulse magnetic control method, the characteristics, such as erosion resistance, salt spray corrosion resistance and acid and alkali corrosion resistance, ofthe prepared high-shielding piece corrosion resistant multi-element coating are excellent.

Description

technical field [0001] The invention relates to the technical field of thin film deposition, in particular to a multi-layer anti-corrosion coating for high shielding parts, a preparation method thereof, and a device used in the preparation method. Background technique [0002] When a helicopter or transport plane takes off, lands, and hovers at low altitude in a desert environment, its engine will inevitably inhale a large amount of sand particles, which repeatedly impact the compressor blades, causing material wear and fatigue cracks; When landing and hovering at low altitude, the engine will inevitably inhale a large amount of salt water, and the blades will be severely corroded due to the heat-salt-force during high-speed rotation; this will seriously affect the flight safety and reliability of the aero-engine, greatly reducing its service life . [0003] In order to improve the anti-sand dust impact and corrosion performance of the engine, it is generally necessary to d...

AI Technical Summary

Problems solved by technology

However, the higher the coating density, the greater the internal stress of the film layer, which will increase the brittleness of the coating, resulting in insufficient toughness; the lower the coating density, the smaller the internal stress of the film layer, and the worse the relative density of the film layer. Corrosion resistance is worse in high salt spray environment

Therefore, the existing anti-corrosion coatings cannot meet the requirements of increasing the toughness and anti-corrosion performance of the blade surface coating at the same time.

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