Piezoelectric integrated flexible tactile sensor and preparation method thereof

Abstract

The invention discloses a piezoelectric integrated flexible tactile sensor and a preparation method thereof. The piezoelectric integrated flexible tactile sensor comprises a double-gate structure metal oxide TFT, a piezoelectric film layer which is located on a top gate electrode layer of the double-gate structure TFT and contains zinc oxide nanowires, and an upper electrode located on the nano piezoelectric film layer. The top gate electrode layer, the zinc oxide nanowire or nanobelt piezoelectric film layer and the upper electrode form a nano piezoelectric sensitive unit. According to the flexible tactile sensor, the double-gate structure metal oxide TFT and a nano piezoelectric film sensor are integrated, the metal oxide TFT serves as a charge amplifier and also serves as an array element switch, and the advantages of high sensitivity, high resolution, high signal-to-noise ratio, high flexibility, high anti-interference capacity and adjustable sensitivity and measuring range are achieved. The preparation process is simple, the cost is low, large-area array preparation can be achieved, and the sensor can be widely applied to the fields of bionic electronic systems, wearable devices, robots, medical health and the like.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a piezoelectric integrated flexible touch sensor and a preparation method thereof. Background technique [0002] Traditional piezoelectric materials such as quartz and lead zirconium titanate (PZT)-based ceramics have been widely used in the field of ultrasonic sensors due to their excellent piezoelectric properties, but their brittleness is not suitable for wearable flexible tactile sensor applications. Organic polymer piezoelectric materials represented by polyvinylidene fluoride (PVDF) are especially suitable for flexible tactile sensors due to their excellent flexibility, but their relatively low piezoelectric properties are difficult to meet the application requirements of high-sensitivity sensors. In order to further improve the sensitivity of flexible tactile sensors, exploring new materials with both high piezoelectric coefficient and high flexibility has become a key tec...

AI Technical Summary

Problems solved by technology

However, although organic thin-film transistors have the advantages of low cost and flexibility, their low mobility and unfriendly environment limit their application in large-scale high-performance tactile sensors; in addition, organic piezoelectric sensitive materials have high flexibility. advantages, but the piezoelectric coefficient is much smaller than that of inorganic piezoelectric materials, resulting in low sensitivity of the tactile sensor

On the other hand, the TFT of the current integrated flexible tactile sensor adopts a single-gate structure, and the threshold voltage of the TFT cannot be dynamically adjusted, so the sensitivity and range of the tactile sensor cannot be self-adapted, and the sensitivity is relatively low. It is difficult to detect external effects such as

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