Electroplating copper cylinder solution suitable for oversize current density and electroplating method
A technology of current density and electroplating copper, applied in the field of materials, can solve the problems of voids, long time consumption of electroplating copper pillars, unstable signal transmission, etc.
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Embodiment 1
[0064] The formula consists of the following:
[0065] Copper methanesulfonate: 200g / L;
[0066] Methanesulfonic acid: 50g / L;
[0067] Chloride ion: 50mg / L, mainly provided by one or more in copper chloride dihydrate, sodium chloride or hydrochloric acid;
[0068] Sodium polydisulfide dipropane sulfonate: 4mg / L;
[0069] Polyethylene glycol: 60mg / L;
[0070] Tobacco green: 80mg / L;
[0071] Solution preparation process: Take 1L solution as an example, take 300ml of water, add copper methanesulfonate: 200g; methanesulfonic acid: 50g, copper chloride dihydrate: 0.114g, sodium polydithiodipropanesulfonate: 0.004g ; Polyethylene glycol: 0.06g; Yanlu green: 0.08g, stir to dissolve, and then add water to the liquid level to 1L.
[0072] Process parameters for electroplating using the copper electroplating solution prepared in this example: pre-treatment vacuuming: 5min, solution exchange time: 5min, temperature: 35±2°C, current density: 30A / dm 2 , the stirring rate is 200r / min,...
Embodiment 2
[0075] The formula consists of the following:
[0076] Copper methanesulfonate: 220g / L;
[0077] Methanesulfonic acid: 60g / L;
[0078] Chloride ion: 50mg / L, mainly provided by one or more in copper chloride dihydrate, sodium chloride or hydrochloric acid;
[0079] Sodium polydisulfide dipropane sulfonate: 2mg / L;
[0080] Polyethylene glycol: 60mg / L;
[0081] Diphenylmethane dye: 60mg / L;
[0082] Solution preparation process: Take 1L solution as an example, take 300ml of water, add copper methanesulfonate: 220g; methanesulfonic acid: 60g, copper chloride dihydrate: 0.114g, sodium polydithiodipropanesulfonate: 0.002g ; Polyethylene glycol: 0.06g; Diphenylmethane dye: 0.06g, stir to dissolve, and then add water to the liquid level to 1L.
[0083] Process parameters for electroplating using the copper electroplating solution prepared in this example: pretreatment vacuuming: 5min, solution exchange time: 10min, temperature: 25±2°C, current density: 30A / dm 2 , the stirring rat...
Embodiment 3
[0086] The formula consists of the following:
[0087] Copper methanesulfonate: 240g / L;
[0088] Methanesulfonic acid: 50g / L;
[0089] Chloride ion: 40mg / L, mainly provided by one or more in copper chloride dihydrate, sodium chloride or hydrochloric acid;
[0090] Sodium polydisulfide dipropane sulfonate: 4mg / L;
[0091] Polyethylene glycol: 60mg / L;
[0092] Tobacco green: 70mg / L;
[0093]Solution preparation process: Take 1L solution as an example, take 300ml of water, add copper methanesulfonate: 240g; methanesulfonic acid: 50g, copper chloride dihydrate: 0.091g, sodium polydisulfide dipropanesulfonate: 0.004g ; Polyethylene glycol: 0.06g; Yanlu green: 0.07g, stir to dissolve, and then add water to the liquid level to 1L.
[0094] Process parameters for electroplating using the copper electroplating solution prepared in this example: pre-treatment vacuuming: 10 min, solution exchange time: 10 min, temperature: 30±2°C, current density: 25A / dm 2 , stirring rate 200r / min,...
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