Single-mass-block three-axis MEMS inertial accelerometer and preparation method thereof

An accelerometer, single-mass technology, used in the measurement of acceleration, acceleration measurement using inertial force, multi-dimensional acceleration measurement, etc., can solve problems affecting sensing sensitivity and accuracy

Active Publication Date: 2020-06-23
YANGZHOU UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The MEMS multi-axis accelerometer with a single-mass structure uses the same mass to sense the motion acceleration of multiple orthogonal axes. , easy to process and manufacture, etc., but there are cross-coupling and mutual interference between the sensing values ​​between the axes, which affect the sensing sensitivity and accuracy

Method used

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  • Single-mass-block three-axis MEMS inertial accelerometer and preparation method thereof
  • Single-mass-block three-axis MEMS inertial accelerometer and preparation method thereof
  • Single-mass-block three-axis MEMS inertial accelerometer and preparation method thereof

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specific Embodiment

[0188] Specific embodiment: a single-mass three-axis MEMS inertial accelerometer.

[0189] combine Figure 1 to Figure 8 , the single-mass three-axis MEMS inertial accelerometer includes a base plate 1, a cavity structure layer 2, a cantilever beam and mass block structure layer 3, and a top plate 4, and each of the above-mentioned structure layers is bonded sequentially from bottom to top.

[0190] combine Figure 1 to Figure 3 , the base plate 1 includes a base plate substrate 11, 4 sets of side capacitor output electrodes 12, 4 sets of side capacitor external electrodes lower lead-out electrodes 13, a base plate bonding ring 14, and 8 base plate metal through holes 15;

[0191] The bottom plate substrate is a substrate with a square cross-section;

[0192] Four sets of side capacitance output electrodes 12 are located on the four sides of the bottom surface of the base substrate and are symmetrically distributed relative to the center of the bottom surface of the base subst...

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Abstract

The invention discloses a single-mass-block three-axis MEMS inertial accelerometer which comprises a bottom plate, a cavity structure layer, a mass block and cantilever beam structure layer and a topplate which are sequentially bonded from bottom to top. The cavity substrate bottom surface bonding rings on four sides of the bottom surface of the cavity structure layer are bonded with the bottom plate bonding ring gold on four sides of the top surface of the bottom plate. The bottom surface of the cantilever beam clamped frame is bonded with the top surface of the cavity substrate on the foursides of the top surface of the cavity structure layer through gold-silicon bonding. Each cantilever beam is suspended above the cavity, and the mass block is suspended in the cavity. The grounding extraction electrodes on four sides of the bottom surface of the top plate are bonded with the grounding electrode gold on the top surface of the cantilever beam clamped frame. According to the invention, a single mass block inertia sensitive mode and a plane parallel plate capacitance detection mode are adopted, the overall structure is simple, the preparation process is simple and convenient, andthe sensing sensitivity and the sensing precision of each axial acceleration are high.

Description

technical field [0001] The invention relates to an inertial accelerometer, in particular to a single-mass three-axis MEMS inertial accelerometer. Background technique [0002] Accelerometers are widely used in automotive, consumer electronics, industrial control and other fields, and are the most important class of inertial sensors. MEMS accelerometers are based on micro-mechanical electronics (MEMS) technology and are manufactured using micro-processing techniques. They have the advantages of small size, light weight, low energy consumption, and high reliability. [0003] The main body of the motion-sensitive structure of the MEMS accelerometer includes a mass block and a mass block suspension support system, and senses the acceleration of linear acceleration motion by detecting the relative displacement of the mass block. The motion-sensitive methods of MEMS accelerometers include capacitive, piezoresistive, piezoelectric, and resonant, among which the most successful and...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/125G01P15/18B81C1/00B81B3/00
CPCG01P15/125G01P15/18B81B3/0021B81C1/0015B81C1/00238G01P2015/0862B81B2201/0235
Inventor 赵成杨义军朱骏郭鹏飞王健
Owner YANGZHOU UNIV
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