Vertical channel tunable high-flux acoustic fluidic sorting chip and preparation method thereof

Abstract

The invention discloses a vertical channel tunable high-flux acoustic fluidic sorting chip and a preparation method thereof. The vertical channel tunable high-flux acoustic fluidic sorting chip comprises a glass sheet with a standing wave resonant cavity, a piezoelectric ceramic sheet and a PDMS (polydimethylsiloxane) film. The standing wave resonant cavity is formed by sequentially laminating andpackaging a glass bottom sheet, a glass gasket I, a glass spacer I, a glass gasket II, a PDMS (Polydimethylsiloxane) film and a glass top sheet from bottom to top, and the resonant cavity comprises two cavities and is provided with a sample inlet and a sample outlet. The height of the resonant cavity is micron-sized, and the width of the resonant cavity is centimeter-sized, so that high-flux fluid flow is realized. The piezoelectric ceramic sheet is adhered to the bottom of the resonant cavity, and two wires are led out from two poles. The piezoelectric ceramic is driven by an external electric signal to generate a standing wave field in the vertical direction in a channel, and different particles are sorted in the vertical direction. The preparation process is simple, the channel heightis adjustable, the cost is low, the controllability is high, and the vertical channel tunable high-flux acoustic fluidic sorting chip is convenient and suitable for large-flux aggregation, separationand control of biological samples such as cells.

Description

technical field [0001] The invention belongs to the field of micro-total analysis, in particular to a tunable high-throughput acoustic fluid control sorting chip based on a vertical channel of bulk acoustic waves and a preparation method thereof. Background technique [0002] Microfluidic chip technology originated in the 1990s and was initially applied in the field of analytical chemistry. It uses microchannels as its structural features and takes life sciences as its main research object. Including sample pretreatment, reaction, separation, detection, etc., are integrated on the microchip, which greatly improves the analysis speed. It has the characteristics of high integration, low reagent consumption, low production cost, and high analysis efficiency. The application prospect is the focus of the current micro-total analysis system research. [0003] For the particles in the fluid with the particle size smaller than the wavelength of the sound wave, the ultrasonic standi...

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Problems solved by technology

[0004] At present, in the microfluidic system, devices are sorted in the horizontal direction, resulting in a relatively low sorting flux (<1mL / min), and the preparation is complicated. Generally, the wet etching method is used to separate the components on hard surfaces such as silicon wafers. Etch a micro-network structure on the material, drill holes on the silicon wafer with a pulse laser, and then bond the glass to the silicon wafer with the microstructure etched by anodic bonding to form an acoustic wave chip. Millions of anodic bonding equipment, which increases the cost of preparation

And it faces a high temperature and high voltage working environment, which is not conducive to the safety of the experimenter

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