Displacement sensing device based on Bloch surface wave one-way coupling effect

Abstract

The invention relates to a displacement sensing device based on a Bloch surface wave one-way coupling effect. The device comprises a leakage radiation microscopy system, the leakage radiation microscopy system sequentially comprises a laser, a lens group, a polarizing film, a half slide, an incident objective lens, a displacement platform, a collection objective lens, a collection lens and an imaging camera along the trend of optical signals, a displacement sensing chip is arranged on the displacement platform, and the displacement sensing chip is a Bloch surface wave one-way coupling chip. According to the invention, the used incident light field is simple, vector beam shaping is not needed, and the extinction ratio of Bloch surface light field changes drastically along with the relativedisplacement of the incident light field and the chip, so that the sensing sensitivity and precision are high, and the response speed is high. Meanwhile, the measuring range is also increased. Besides, the Bloch surface wave one-way coupling chip used in the invention is of an all-dielectric structure, is easy to store and high in repeated utilization rate, has a high error-tolerant rate, is easyto process, and reduces the processing difficulty.

Description

technical field [0001] The invention relates to the field of optical sensing, in particular to a displacement sensing device based on the one-way coupling effect of Bloch surface waves. Background technique [0002] Optical metrology and position sensing technologies play a key role in many fields of modern science and technology, such as gravitational wave detection, molecular conformational change sensing, and scanning probe microscopy. Although diffraction limits the optical resolution, optical techniques are still useful in many ways due to their non-contact capabilities. Researchers have realized deep subwavelength displacement sensing with active and passive methods. Active methods include Foster resonance energy transfer method and second harmonic method. Passive methods include traditional macroscopic interferometers, nanoantennas Directional scattering, near-field interference, localized plasmon resonance, electromagnetic field singularities and optical skyrmions, ...

AI Technical Summary

Problems solved by technology

[0004] In view of the above-mentioned shortcomings of the prior art, the present invention provides a displacement sensing device based on the Bloch surface wave one-way coupling effect, which solves the problems of low sensitivity, small range and complex incident light field of the existing displacement sensing device

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