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Gradient layer calcium carbonate-calcium silicate total-reflection film and preparation method thereof

A calcium carbonate and calcium silicate technology, applied in coating, metal material coating process, gaseous chemical plating and other directions, can solve the problems of high cost and low life of calcium fluoride materials, and achieve low price and easy availability of raw materials. , good reflection effect

Active Publication Date: 2020-08-14
广东拾传拾美新材料有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In traditional technology, the most widely used material in the all-reflection film industry is calcium fluoride (CaF 2 ), but the cost of calcium fluoride material is high, and it is slightly soluble in water, and the service life is low, and the preparation process of fluorine-containing products will involve environmental protection issues

Method used

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  • Gradient layer calcium carbonate-calcium silicate total-reflection film and preparation method thereof
  • Gradient layer calcium carbonate-calcium silicate total-reflection film and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0032] The selected substrate is ITO glass purchased by CSG, ultrasonically cleaned with toluene, acetone and ethanol for 5 minutes, then rinsed with distilled water, air-dried with nitrogen, and sent to the reaction chamber of the equipment.

[0033] Use a mechanical pump and a molecular pump to evacuate the vacuum of the reaction chamber of the equipment to 4.0×10 -3 Pa; then heat-treat the substrate at 700°C for 15 minutes, and then lower the temperature to 500°C for thin film deposition.

[0034] Turn on the rotation motor and adjust the rotation speed of the substrate holder to 300 rpm.

[0035] A gas source containing calcium cyclopentadiene and argon as a carrier gas are fed in at a flow rate of 10 sccm, and then oxygen gas is fed in at a flow rate of 120 sccm to form a calcium oxide layer on the ITO glass for 18 minutes.

[0036] Introduce carbon dioxide with a flow rate of 150 sccm to deposit a calcium carbonate layer on the surface of the calcium oxide layer for 15 ...

Embodiment 2

[0040] The substrate is ITO glass purchased by CSG, and it is ultrasonically cleaned with toluene, acetone and ethanol for 8 minutes, then rinsed with distilled water, air-dried with nitrogen, and sent to the reaction chamber of the equipment.

[0041] Use a mechanical pump and a molecular pump to evacuate the vacuum of the reaction chamber of the equipment to 3.5×10 -4 Pa; then the substrate is heat-treated at 800°C for 20 minutes, and then the temperature is lowered to 500°C for thin film deposition.

[0042] Turn on the rotation motor and adjust the rotation speed of the substrate holder to 400 rpm.

[0043] A gas source containing calcium cyclopentadiene and argon as a carrier gas are fed in at a flow rate of 20 sccm, and then oxygen gas is fed in at a flow rate of 180 sccm to deposit a calcium oxide layer on one side of the ITO glass for 10 minutes.

[0044] Introduce carbon dioxide with a flow rate of 110 sccm to deposit a calcium carbonate layer on the surface of the c...

Embodiment 3

[0049] The substrate is ITO glass purchased by CSG, and it is ultrasonically cleaned with toluene, acetone and ethanol for 5 minutes, then rinsed with distilled water, air-dried with nitrogen, and sent to the reaction chamber of the equipment.

[0050] Use a mechanical pump and a molecular pump to evacuate the vacuum of the reaction chamber of the equipment to 4.0×10 -3 Pa, and then the substrate was heat-treated at 700°C for 15 minutes, and then the temperature was lowered to 500°C for thin film deposition.

[0051] Turn on the rotation motor and adjust the rotation speed of the substrate holder to 300 rpm.

[0052] Introduce the gas source containing cyclopentadiene calcium and the carrier gas Ar gas, the gas flow is 10sccm, then oxygen is introduced, the flow is 120sccm, and carbon dioxide is introduced at the same time, the flow is 150sccm, and a calcium carbonate layer is deposited on one side of the ITO glass , for 15 minutes.

[0053] Turn off the carbon dioxide, feed...

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Abstract

The invention relates to a gradient layer calcium carbonate-calcium silicate total-reflection film and a preparation method thereof. The gradient layer calcium carbonate-calcium silicate total-reflection film comprises a substrate, a calcium carbonate layer, a calcium silicate layer and a silicon oxide layer which are sequentially arranged, and the calcium carbonate layer, the calcium silicate layer and the silicon oxide layer are sequentially attached to the substrate. Calcium carbonate and calcium silicate are adopted as layer materials, the raw materials are easy to obtain, low in price, environmentally friendly and non-toxic, the optical total-reflection film can be designed into a calcium carbonate / calcium silicate / silicon oxide multilayer structure, refraction and reflection controlover light rays with different wavelengths is achieved, total reflection of light rays with different wavelengths is achieved, and the reflection effect is good.

Description

technical field [0001] The invention relates to the technical field of all-reflective films, in particular to a gradient-layer calcium carbonate-calcium silicate full-reflection film and a preparation method thereof. Background technique [0002] Total reflection film is a material that can maximize the high reflection of light without loss, and is widely used in optical fiber, lens and other technical fields. In traditional technology, the most widely used material in the all-reflection film industry is calcium fluoride (CaF 2 ), but the cost of calcium fluoride material is high, and it is slightly soluble in water, and its lifespan is low, and the preparation process of fluorine-containing products will involve environmental protection issues. Contents of the invention [0003] Based on this, it is necessary to address the above problems and provide a gradient layer calcium carbonate-calcium silicate total reflection film, which can realize total reflection for differen...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/08C23C16/30C23C16/40
CPCG02B5/0833C23C16/30C23C16/402C23C16/404
Inventor 温智棋
Owner 广东拾传拾美新材料有限公司
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