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A kind of cleaning method of black silicon fleece sheet

A technology of black silicon and velvet, applied in the field of solar cell manufacturing, can solve the problems of poor suede stability, low photoelectric conversion efficiency, and increased suede reflectivity, etc.

Active Publication Date: 2022-03-29
YINGLI ENERGY CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Aiming at the problems of easy increase of reflectivity of the suede surface, poor stability of the suede surface and low photoelectric conversion efficiency existing in the cleaning method of the black silicon texturing process, the present invention provides a cleaning method of the black silicon texturing sheet

Method used

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  • A kind of cleaning method of black silicon fleece sheet

Examples

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Effect test

Embodiment 1

[0022] During the fabrication of solar cells, the black silicon textured sheets induced by metal ions are cleaned as follows:

[0023] (1) Place the black silicon textured sheet after demetallization in the metal ion-induced black silicon texturing process at a temperature of 20°C and an ozone concentration of 0.4g / m 3 In the ozone aqueous solution, ultrasonic cleaning treatment for 100s;

[0024] (2) Soak the black silicon textured sheet treated in step (1) with pure water at a temperature of 20° C. for 2 minutes;

[0025] (3) putting the black silicon textured sheet cleaned with pure water in step (2) into a mixed solution of hydrofluoric acid and ammonium fluoride at a temperature of 20° C. to soak for 2 minutes, the mixed solution having a mass concentration of 40% The hydrofluoric acid solution and the ammonium fluoride solution with a mass concentration of 37% are mixed in a volume ratio of 2:1;

[0026] (4) Soak the black silicon textured sheet treated in step (3) wit...

Embodiment 2

[0031] During the fabrication of solar cells, the black silicon textured sheets induced by metal ions are cleaned as follows:

[0032] (1) Place the black silicon textured sheet after demetallization in the metal ion-induced black silicon texturing process at a temperature of 40°C and an ozone concentration of 0.5g / m 3 In the ozone aqueous solution, ultrasonic cleaning treatment for 200s;

[0033] (2) Soak the black silicon textured sheet treated in step (1) with pure water at a temperature of 22°C for 5 minutes;

[0034] (3) putting the black silicon textured sheet cleaned with pure water in step (2) into a mixed solution of hydrofluoric acid and ammonium fluoride at a temperature of 40° C. to soak for 4 minutes, the mixed solution having a mass concentration of 45% The hydrofluoric acid solution and the sodium fluoride solution with a mass concentration of 38% are mixed in a volume ratio of 5:1;

[0035] (4) Soak the black silicon textured sheet treated in step (3) with pu...

Embodiment 3

[0040] During the fabrication of solar cells, the black silicon textured sheets induced by metal ions are cleaned as follows:

[0041] (1) Place the black silicon textured sheet after demetallization in the process of metal ion-induced black silicon texture at a temperature of 55°C and an ozone concentration of 0.6g / m 3 In the ozone aqueous solution, ultrasonic cleaning treatment for 300s;

[0042] (2) Soak the black silicon textured sheet treated in step (1) with pure water at a temperature of 25° C. for 8 minutes;

[0043] (3) putting the black silicon textured sheet cleaned with pure water in step (2) into a mixed solution of hydrofluoric acid and ammonium fluoride at a temperature of 50° C. for 6 minutes, the mixed solution having a mass concentration of 49% The hydrofluoric acid solution and the potassium fluoride solution with a mass concentration of 40% are mixed in a volume ratio of 10:1;

[0044] (4) Soak the black silicon textured sheet treated in step (3) with pur...

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Abstract

The invention relates to the technical field of solar cell manufacturing, and specifically discloses a method for cleaning black silicon textured sheets. The black silicon textured sheet is obtained through the black silicon textured technology induced by metal ions; the cleaning method is: sequentially soak the silicon chip with ozone aqueous solution, pure water, mixed acid solution, pure water, ozone aqueous solution, and pure water processing, and then drying; the mixed acid solution is formed by mixing a hydrofluoric acid solution with a mass concentration of 40-49% and a fluoride solution with a mass concentration of 37-40% in a volume ratio of 2-10:1. The cleaning method of the present invention can control the light reflectivity of the suede surface, improve the photoelectric conversion efficiency, and finally form an extremely thin layer of silicon oxide film on the surface of the micro-trimmed suede surface, which has a remarkable cleaning effect on the surface of the silicon chip.

Description

technical field [0001] The invention relates to the technical field of solar cell manufacturing, in particular to a method for cleaning black silicon textured sheets. Background technique [0002] Black silicon texturing (metal-induced catalytic etching) is a method that has emerged in recent years to form a good submicron-scale rough surface on diamond wire silicon wafers, which can increase the light absorption rate of the silicon wafer surface, thereby improving the performance of solar cells. photoelectric conversion efficiency. Texturing is the first process step in the production of solar cells. Texturing is to create irregular corrosion pits on the surface of silicon wafers, so that more light can enter the silicon wafers when it is incident. [0003] After the silicon wafer cutting technology changed from mortar cutting to diamond wire cutting, the thickness of the damaged layer on the surface of the silicon wafer was greatly reduced, the amount of wafers was increa...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L31/18H01L21/02H01L21/67C11D7/08
CPCH01L31/1804H01L21/02057H01L21/67276C11D7/08Y02E10/547Y02P70/50
Inventor 徐卓王红芳李倩张春旭李锋史金超尚琪陈志军
Owner YINGLI ENERGY CHINA