SHJ solar cell TCO film surface treatment method

Abstract

The invention discloses an SHJ solar cell TCO film surface treatment method, which is used for solving the problem of poor contact between a TCO film and low-temperature silver paste in the prior art,and relates to the technical field of solar cells, and comprises the following steps: (1) depositing intrinsic amorphous silicon or amorphous silica films on the upper surface and the lower surface of a silicon wafer; (2) respectively depositing a P-type doped amorphous silicon film and an N-type doped amorphous silicon film on the upper surface and the lower surface of the silicon wafer obtainedin the step (1), or depositing amorphous silica films on the upper surface and the lower surface of the silicon wafer; (3) depositing TCO films on the upper surface and the lower surface of the silicon wafer obtained in the step (2); (4) carrying out surface treatment on the TCO film by adopting plasma, wherein the surface treatment comprises roughening treatment and modification treatment. According to the method, the contact between the low-temperature silver paste and the surface of the TCO thin film is better, the extension amount of the edge of the paste is low, the extension amount of organic matters in a paste system is small, the conversion efficiency of the SHJ solar cell is effectively improved, and the stability and the product yield of large-scale production of the SHJ solar cell are improved.

Description

technical field [0001] The invention discloses a surface treatment method for a TCO thin film of an SHJ solar cell, which belongs to the technical field of solar cells, and in particular relates to the surface treatment technology of a TCO thin film. Background technique [0002] Solar cell power generation (photovoltaic power generation) is one of the fastest-growing renewable energy technologies. As of the end of 2018, the global cumulative installed capacity has exceeded 400GW, becoming the main force of new energy. As the world's largest producer and installed capacity of solar cells, China's average growth rate has exceeded 140% in the past 10 years, and its cumulative installed capacity is close to 200GW, making it a veritable photovoltaic powerhouse. In recent years, with the rapid expansion and development of the entire photovoltaic industry chain, industrialization technology innovation and the support of relevant national preferential policies, compared with 10 yea...

AI Technical Summary

Problems solved by technology

However, compared with the mature and low-cost screen printing technology, the copper electroplating technology faces the problems of sewage discharge and mask cost, the smart grid connection technology faces the problems of exclusive suppliers and patented technology, the printability of silver-coated copper low-temperature paste and the Product cost is not enough to promote industrialization

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