Device and method for depositing pure DLC (diamond-like carbon) by graphite cathode arc enhanced glow discharge

A graphite cathode, glow discharge technology, applied in ion implantation plating, gaseous chemical plating, coating and other directions, can solve problems such as metal element pollution, and achieve the effect of quality assurance, low cost and low price

Active Publication Date: 2020-10-09
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] The purpose of the present invention is to solve the problem of "pollution" of DLC by metal elements when the existing metal cathode arc enhanced glow discharge is used to prepare DLC, and to provide a device and method for depositing pure DLC by graphite cathode arc enhanced glow discharge

Method used

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  • Device and method for depositing pure DLC (diamond-like carbon) by graphite cathode arc enhanced glow discharge
  • Device and method for depositing pure DLC (diamond-like carbon) by graphite cathode arc enhanced glow discharge
  • Device and method for depositing pure DLC (diamond-like carbon) by graphite cathode arc enhanced glow discharge

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specific Embodiment approach 1

[0029]Specific Embodiment 1: In this embodiment, a device for graphite cathode arc enhanced glow discharge deposition of pure DLC includes a vacuum chamber 9, a turntable 2, a bias power supply 10, a first graphite cathode arc 1-1, and a second graphite cathode arc 1-2, first metal cathode 5-1, second metal cathode 5-2, first anode 3-1, second anode 3-2, first high pulse power supply 4-1, second high pulse power supply 4- 2. The first DC power supply 6-1 and the second DC power supply 6-2; the bottom of the vacuum chamber 9 has an air inlet 7; , four flanges are evenly arranged on the wall of the vacuum chamber 9 along the circumferential direction, and the four flanges are respectively fixedly connected to the first graphite cathode arc 1-1, the first metal cathode 5-1, and the second graphite cathode arc 1-2 and the second metal cathode 5-2; a baffle 8 is arranged between the first graphite cathode arc 1-1 and the second graphite cathode arc 1-2 and the turret 2, and the two...

specific Embodiment approach 2

[0031] Specific embodiment two: the difference between this embodiment and specific embodiment one is that the turret 2, the first graphite cathode arc 1-1, the second graphite cathode arc 1-2, the first metal cathode 5-1, the second metal The cathode 5-2, the first anode 3-1, the second anode 3-2, and the baffle 8 are all insulated from the vacuum chamber 9. Others are the same as the first embodiment.

[0032] In this embodiment, the transfer frame 2, the first graphite cathode arc 1-1, the second graphite cathode arc 1-2, the first metal cathode 5-1, the second metal cathode 5-2, the first anode 3-1, the second Both the anode 3-2 and the baffle 8 are insulated from the vacuum chamber 9 by polytetrafluoroethylene.

specific Embodiment approach 3

[0033] Specific embodiment three: the difference between this embodiment and specific embodiment one or two is that: the electrical connection end of the first anode 3-1 is electrically connected with the positive pole of the first high pulse power supply 4-1, and the first high pulse power supply 4-1 The negative pole of 1 is electrically connected to the electrical connection end of the first graphite cathode arc 1-1; the electrical connection end of the second anode 3-2 is electrically connected to the positive pole of the second high pulse power supply 4-2, and the second high pulse power supply 4- The negative electrode of 2 is electrically connected to the electrical connection end of the second graphite cathode arc 1-2. Others are the same as those in Embodiment 1 or 2.

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Abstract

The invention relates to a device and method for depositing pure DLC (diamond-like carbon) by graphite cathode arc enhanced glow discharge. The invention aims to solve the problem that metal elementspollute DLC when the DLC is prepared by existing metal cathode arc enhanced glow discharge. A discharge path is constructed between a graphite cathode arc and an anode, carbon-containing gas is introduced into the discharge path, and the introduced carbon-containing gas is ionized by high-density electrons emitted by the graphite cathode arc and deposited on the surface of a workpiece to form thepure DLC. The proportion of ions to atoms in carbon-containing plasma can be controlled by changing a discharge mode between the cathode and the anode and adjusting discharge parameters. By the deviceand the method, the adverse effect of metal doping on tribological properties is avoided when the DLC is prepared by metal target enhanced glow discharge. The device and method are applied to the field of preparation of the DLC by plasma enhanced chemical vapor deposition.

Description

technical field [0001] The invention relates to a device and method for depositing pure DLC by enhanced glow discharge of graphite cathode arc. Background technique [0002] DLC (Diamond-like carbon) film has been widely used due to its low friction coefficient, high hardness, good wear resistance and its chemical inertness, such as auto parts, ship hull corrosion resistance and aluminum alloy processing. [0003] There are many methods for depositing DLC, mainly based on plasma chemical vapor deposition (PECVD). The most widely used in industry is the method of workpiece self-glow discharge. In this method, the workpiece itself is used as the discharge source, and a medium and high frequency bias voltage is applied on it, and the bias voltage is generally higher than -300V. This method has the following problems: 1. It is greatly affected by the shape of the workpiece and the amount of furnace. If the workpiece changes, the process needs to be readjusted; 2. The strength ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/26C23C16/503C23C16/515C23C16/517C23C14/16C23C14/06
CPCC23C16/26C23C16/503C23C16/515C23C16/517C23C14/16C23C14/0641C23C14/0664C23C14/0605C23C14/0021
Inventor 田修波胡健巩春志
Owner HARBIN INST OF TECH
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