Coupling output structure of terahertz quantum cascade laser and packaging method of coupling output structure

Abstract

The invention relates to a coupling output structure of a terahertz quantum cascade laser, and the structure comprises a terahertz quantum cascade laser, a first off-axis parabolic mirror and a secondoff-axis parabolic mirror; the focus of the first off-axis parabolic mirror is positioned in the front end surface of the terahertz quantum cascade laser, and the collimator is used for collecting and collimating laser emitted by the terahertz quantum cascade laser and forming a first quasi-parallel light beam; the second off-axis parabolic mirror is located in the rear end face of the terahertzquantum cascade laser and used for collecting and collimating laser emitted by the terahertz quantum cascade laser and forming a second quasi-parallel light beam. The invention further relates to a packaging method of the coupling output structure of the terahertz quantum cascade laser. According to the invention, double-end-surface laser high-efficiency coupling output can be realized.

Description

technical field [0001] The invention relates to the technical field of terahertz lasers, in particular to a coupling output structure of a terahertz quantum cascade laser and a packaging method thereof. Background technique [0002] Terahertz (THz) quantum cascade laser (QCL) is a very important compact laser source in the THz frequency band. It has the characteristics of small size, stable performance, high energy conversion efficiency, and long service life. Among the various shapes of THz QCLs, the ridge-stripe device is the most common one. Since the size of the laser ridge in the thickness direction is smaller than the laser wavelength, the laser emitted by the THz QCL end face shows a certain divergence. In order to improve the output beam of this laser, the process improvement can be carried out on the ridge structure or the laser output end face, through Preparation of structured gratings or end face microstructures to improve the quality of the output laser beam, b...

AI Technical Summary

Problems solved by technology

However, in the actual application process, usually only one end face of the laser is coupled, and the coupling output method used needs to operate and move the position of the coupling optics under vacuum, the implementation method is relatively complicated, and it is prone to low-temperature Dewar air leakage , at this time, the laser output from the other end face is wasted; although there is also a way to increase the total power of the light output end face by evaporating the dielectric / metal high reflection film on the other end face, but due to the low quality of the preparation process of the high reflection film and the laser There is reflection loss at the output end face, etc., the above-mentioned improvements can only obtain about 1.4 times the laser power of the single-sided output, and 0.6 times the single-sided output power is still wasted

The structure of simultaneous coupling output from both end faces of the laser has not yet been reported

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