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Thermopile power generation device based on super-hydrophilic structure and preparation method thereof

A super-hydrophilic, thermopile technology, applied in the manufacture/processing of thermoelectric devices, thermoelectric device parts, thermoelectric devices using only Peltier or Seebeck effect, etc. The effect of stable structure and improved power generation efficiency of devices

Active Publication Date: 2021-01-05
HUAZHONG UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In addition, the charge transfer method has the disadvantage of short service life

Method used

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  • Thermopile power generation device based on super-hydrophilic structure and preparation method thereof
  • Thermopile power generation device based on super-hydrophilic structure and preparation method thereof
  • Thermopile power generation device based on super-hydrophilic structure and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0067] Include the following steps:

[0068] 1) cleaning

[0069] Using a silicon wafer as the substrate material, the substrate was ultrasonically cleaned with acetone, alcohol, and deionized water for 30 minutes, dried with nitrogen gas, and then dried on a hot plate at 100°C for later use.

[0070] 2) Plating insulating layer

[0071] Magnetron sputtering is used to sputter a silicon nitride insulating layer on the surface of the substrate with a sputtering thickness of 100 nm. The insulating layer can be used to insulate subsequent electrodes from the substrate.

[0072] 3) Prepare cold end area graphics

[0073] The pattern of the cold end area is prepared by photolithography steps such as gluing, pre-baking, exposure, and development.

[0074] 4) Plating cold end material

[0075] The cold end material is deposited on the surface of the substrate by magnetron sputtering, including the cold end material itself and the corresponding protective layer, and the cold end ...

Embodiment 2

[0108] Except the process parameter in table 2, other specific operation steps and parameter are the same as embodiment 1.

[0109] The technological parameter that table 2 embodiment 2 adopts

[0110]

[0111]

Embodiment 3

[0113] Except the process parameter in table 3, other specific operation steps and parameter are the same as embodiment 1.

[0114] The technological parameter that table 3 embodiment 3 adopts

[0115]

[0116]

[0117] In the above embodiment, steps 3), 5), 7), 10), 13) and 15) can be prepared by photolithography or directly apply a physical mask. When the size is greater than 100 μm, a physical mask is selected. Below Photolithography is preferred for 10μm, electron beam lithography is used for preparation below 500nm, and lower cost is preferred for other ranges. The thickness of the insulating material in steps 2), 9) and 12) depends on the requirements of the degree of insulation, and the materials and thicknesses of the three are the same (for example, the thickness can be 300nm). In addition to the above examples, step 16) the superhydrophilic seed layer can also be other materials that can grow a superhydrophilic layer by the subsequent solution method, and step...

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Abstract

The invention belongs to the field of manufacturing of micro-nano structures, and discloses a thermopile power generation device based on a super-hydrophilic structure and a preparation method thereof, the power generation device comprises an insulating substrate and a plurality of power generation units located on the insulating substrate, and each power generation unit comprises a first suspension thermocouple electrode, a second suspension thermocouple electrode and a super-hydrophilic layer; one ends of the two suspension thermocouple electrodes are respectively positioned on the first thermocouple electrode cold end base and the second thermocouple electrode cold end base and are connected with the cold end; the other ends are respectively positioned on the first thermocouple electrode hot end base and the second thermocouple electrode hot end base and are connected with the hot end; the hot end is a suspended super-hydrophilic layer, and the suspended super-hydrophilic layer is of a micro-nano structure. The super-hydrophilic structure is used as the hot end to be matched with the thermocouple electrode to form the thermopile power generation device, the formed thermopile power generation device is high in power generation efficiency and stable in structure, and the preparation method can achieve preparation of the large-scale thermopile array power generation device.

Description

technical field [0001] The invention belongs to the field of manufacturing micro-nano structures, and more specifically relates to a thermopile power generation device based on a superhydrophilic structure and a preparation method thereof. Background technique [0002] With the development of society, people's demand for energy is gradually increasing, especially for electric energy. The current power generation methods mainly include wind power generation, thermal power generation, hydropower generation, and solar cell power generation. These methods all require a large floor space and high investment costs. [0003] A thermopile is a thermocouple array device that converts a temperature difference into a potential difference, which induces an electric current. Therefore, generating a large temperature difference is a key factor for thermopile power generation. At present, commercial thermopile arrays mainly use technical means such as photolithography electrodes, thermo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L35/02H01L35/28H01L35/32H01L35/34H10N10/80H10N10/01H10N10/10H10N10/17
CPCH10N10/80H10N10/10H10N10/01H10N10/17
Inventor 史铁林林建斌谭先华廖广兰孔令贤何春华韩航迪罗京
Owner HUAZHONG UNIV OF SCI & TECH
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