Claw type vacuum pump rotor surface treatment process

A rotor surface treatment, vacuum pump technology, applied in the direction of vacuum evaporation plating, metal material coating process, ion implantation plating, etc., can solve the problems of vacuum pump performance degradation, corrosion resistance, stable pumping speed, etc., to improve fatigue performance, reduced risk of coating spalling, improved corrosion and wear resistance

Active Publication Date: 2021-02-02
连云港恒顺工业科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

For general vacuum systems, due to technical problems such as mechanical wear caused by high-speed rotation of the rotor and the backflow of polluting gases, long-term operation will lead to a serious reduction in the performance of the vacuum pump, making it unable to meet the requirements of corrosion resistance, stable pumping speed and environmental protection of the pumped environment. Cleaner Requirements

Method used

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  • Claw type vacuum pump rotor surface treatment process
  • Claw type vacuum pump rotor surface treatment process
  • Claw type vacuum pump rotor surface treatment process

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0036] Target preparation:

[0037] Put Ta powder, Si powder, Cr powder and Bi powder into the ball mill jar according to the material ratio of 2:7:0.7:0.3 for uniform mixing, pour in absolute ethanol; then use planetary ball mill at 300r / min ball milling for 10 hours at a high speed. Then pour it into a clean container and put it in the oven to dry. Then adopt the cold isostatic pressing technique, press the uniformly mixed powder into a target with a pressure of 600MPa, and sinter in an argon atmosphere. When the temperature in the furnace chamber rises to 1000°C, keep it warm for 3 hours to obtain a deposited target.

[0038] A claw vacuum pump rotor surface treatment process, comprising:

[0039] S1: Pretreatment, quenching and tempering treatment on the matrix; the matrix is The quenching and tempering process is oil cooling at a quenching temperature of 850°C and air cooling at a tempering temperature of 570°C; followed by rough grinding to fine grinding with sandpap...

Embodiment 2

[0047] The difference between the preparation of the target material and that of Example 1 is that the mass ratio of Ta powder, Si powder, Cr powder and Bi powder is 2:7:0.8:0.4.

[0048] A claw vacuum pump rotor surface treatment process is the same as that of Example 1. Wherein, the coating thickness is 10 μm.

Embodiment 3

[0050] The difference between the preparation of the target material and that of Example 1 is that the mass ratio of Ta powder, Si powder, Cr powder and Bi powder is 2:7:0.75:0.5.

[0051] A claw vacuum pump rotor surface treatment process is the same as that of Example 1. Wherein, the coating thickness is 13 μm.

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Abstract

The invention discloses a claw type vacuum pump rotor surface treatment process, and relates to the technical field of vacuum pump rotor surface treatment. The surface treatment process specifically comprises the steps of conducting pretreatment, wherein a base body is subjected to hardening and tempering treatment, and then abrasive paper is used for conducting rough grinding to fine grinding treatment; conducting ultrasonic impact nanocrystallization treatment, wherein nanocrystallization treatment is conducted on the surface of the base body through the milligram energy ultrasonic treatmenttechnology; preparing a coating through double-cathode plasma sputtering deposition, cleaning a furnace chamber, installing a workpiece, and fixing a target material and the base body;; and vacuumizing the interior of the furnace chamber, cleaning the workpiece, and depositing the coating. The base material treated through the surface treatment process provided by the invention has excellent corrosion resistance and abrasion resistance, good fatigue performance and long service life.

Description

technical field [0001] The invention belongs to the technical field of vacuum pump rotor surface treatment, and in particular relates to a claw-type vacuum pump rotor surface treatment process. Background technique [0002] Vacuum industry is an important basic link in the field of national industrial technology, which is highly valued by domestic and foreign scientific research institutions. It is widely used in national defense science and industry, steel industry, coating, microelectronic information, semiconductor, biomedicine, chemical industry, food, environmental protection and other industries. The comprehensive performance of vacuum equipment is related to the production capacity and research and development capacity of the country's overall high-tech equipment. In recent years, the reintegration of the national resource structure has put forward higher requirements for cleanliness, pollution-free, and artificial intelligence. The direction of high automation has b...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34C23C14/16
CPCC23C14/165C23C14/3414
Inventor 许瀚程张会霞许同柱邹昶方
Owner 连云港恒顺工业科技有限公司
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