Preparation method of titanium-aluminum alloy target material

A technology of titanium-aluminum alloy and target materials, which is applied in the field of target materials, can solve problems such as strength, toughness, corrosion resistance and fatigue resistance, etc., and improve anti-fretting fatigue performance, improve fretting wear resistance, The effect of improving the toughness of the alloy

Inactive Publication Date: 2021-02-26
光洋新材料科技(昆山)有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] To this end, the present invention provides a method for preparing a titanium-aluminum alloy target, by adding ingredients powder and trace powder in proportion to solve the problems of traditional titanium-aluminum alloys, such as strength, toughness, corrosion resistance and corrosion resistance. Fatigue and other performance problems that are difficult to overcome

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0028] The preparation method of a titanium-aluminum alloy target material provided by the present invention includes main material powder, ingredient powder and trace powder, and also includes the following steps:

[0029] S1: Mix the main ingredient powder, ingredient powder and trace powder evenly, and filter large particles of impurities, retain powdery particles of equal size, and obtain mixed powder;

[0030] S2: Pour the mixed powder retained after filtering in S1 into medical alcohol for soaking and cleaning;

[0031] S3: Take out the soaked mixed powder particles and place them at room temperature for air-drying, the room temperature is 30 degrees Celsius, and the air-drying time is 2 hours;

[0032] S4: pressing the dried mixed powder obtained after air-drying in S3 to form a green body;

[0033] S5: put the green body obtained in S4 into a hot-press sintering furnace for sintering, during the sintering process, set the pressure in the hot-press sintering furnace to...

Embodiment 2

[0049] The preparation method of a titanium-aluminum alloy target material provided by the present invention includes main material powder, ingredient powder and trace powder, and also includes the following steps:

[0050] S1: Mix the main ingredient powder, ingredient powder and trace powder evenly, and filter large particles of impurities, retain powdery particles of equal size, and obtain mixed powder;

[0051] S2: Pour the mixed powder retained after filtering in S1 into medical alcohol for soaking and cleaning;

[0052] S3: Take out the soaked mixed powder particles and place them at room temperature for air-drying, the room temperature is 30 degrees Celsius, and the air-drying time is 2 hours;

[0053] S4: pressing the dried mixed powder obtained after air-drying in S3 to form a green body;

[0054] S5: put the green body obtained in S4 into a hot-press sintering furnace for sintering, during the sintering process, set the pressure in the hot-press sintering furnace to...

Embodiment 3

[0070] The preparation method of a titanium-aluminum alloy target material provided by the present invention includes main material powder, ingredient powder and trace powder, and also includes the following steps:

[0071] S1: Mix the main ingredient powder, ingredient powder and trace powder evenly, and filter large particles of impurities, retain powdery particles of equal size, and obtain mixed powder;

[0072] S2: Pour the mixed powder retained after filtering in S1 into medical alcohol for soaking and cleaning;

[0073] S3: Take out the soaked mixed powder particles and place them at room temperature for air-drying, the room temperature is 30 degrees Celsius, and the air-drying time is 2 hours;

[0074] S4: pressing the dried mixed powder obtained after air-drying in S3 to form a green body;

[0075] S5: put the green body obtained in S4 into a hot-press sintering furnace for sintering, during the sintering process, set the pressure in the hot-press sintering furnace to...

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Abstract

The invention discloses a preparation method of a titanium-aluminum alloy target material. According to the technical scheme, the preparation method of the titanium-aluminum alloy target material comprises main material powder, ingredient powder and trace powder, and further comprises the following steps that S1, the main material powder, the ingredient powder and the trace powder are mixed to beuniform, large-particle impurities are filtered out, powdery particles with the equal size are reserved, and mixed powder is obtained; and S2, the mixed powder remained after filtering in the step S1is poured into medical alcohol for soaking and cleaning; The preparation method of the titanium-aluminum alloy target material has the beneficial effects that the titanium-aluminum alloy target material is prepared by adding the ingredient powder composed of silicon powder and magnesium powder and the trace powder composed of chromium powder and then adopting a powder metallurgy method, the strength of the alloy is improved, the casting performance, the corrosion resistance and the welding performance are all improved, the finally prepared titanium-aluminum alloy target material is excellent in performance, balanced in attributes in all aspects and simple in production process, and therefore the production cost can be reduced, and production is more economical.

Description

technical field [0001] The invention relates to the technical field of targets, in particular to a method for preparing a titanium-aluminum alloy target. Background technique [0002] Titanium-aluminum alloy is a silver-white metal with many excellent properties. The density of titanium is 4.54g / cm3, which is 43% lighter than steel and slightly heavier than the prestigious light metal magnesium. The mechanical strength is about the same as that of steel, twice that of aluminum and five times that of magnesium. Titanium is resistant to high temperatures, with a melting point of 1942K, nearly 1000K higher than gold, and nearly 500K higher than steel. Titanium-aluminum alloys are also widely used in the vacuum coating industry, and can be made into a certain proportion of alloy targets as raw materials for magnetron sputtering coatings. Titanium-aluminum alloy has a variety of composition ratios when making vacuum coating targets. The commonly used ones are titanium-aluminum ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34C22C21/00B22F3/14B22F5/00C22C1/04
CPCC23C14/3414C22C21/003C22C1/0416B22F3/14B22F5/00
Inventor 林泓成黄军浩
Owner 光洋新材料科技(昆山)有限公司
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