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Flexible pressure sensor and preparation method thereof, sensing system and flexible electronic skin

A technology of electronic skin and tactile sensor, which is applied in the field of flexible pressure sensor and flexible electronic skin, can solve problems such as the difficult detection range of tiny pressure sensors, limited sensor application scenarios, and the complexity of high-sensitivity sensors, achieving small hysteresis and easy Operation, the effect of high initial sensitivity

Active Publication Date: 2021-03-26
HEFEI AICHUANGWEI ELECTRONIC TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] At present, there are three main deficiencies in sensors at home and abroad. First, it is difficult for tiny pressure sensors to have a large detection range, and the sensor fails under large tactile pressure, which limits the application scenarios of the sensor; second, high-sensitivity sensors are often accompanied by complex And the high-cost manufacturing process introduces more uncertainties in the manufacturing process, thereby limiting large-scale promotion and application; third, the sensor depends on environmental variables such as temperature

Method used

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  • Flexible pressure sensor and preparation method thereof, sensing system and flexible electronic skin
  • Flexible pressure sensor and preparation method thereof, sensing system and flexible electronic skin
  • Flexible pressure sensor and preparation method thereof, sensing system and flexible electronic skin

Examples

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preparation example Construction

[0056] A preparation method according to the above-mentioned high-sensitivity capacitive flexible pressure tactile sensor has the following steps: first, based on 3D printing technology and silicone rubber fluid molding technology, utilize the three-dimensional CAD design software SolidWorks2019 to model, and design the present invention. The mold required for the first planar excitation electrode 11, the second planar excitation electrode 21 and the first tip structure 311 and the second tip structure 321 of two types of sizes; after that, prepare a composite material electrode of carbon nanotubes and copolyester, based on 3D printing technology, print out the electrode mold, disperse the carbon nanotubes in isopropanol according to the weight ratio of 0.05wt%, pour an appropriate amount of copolyester prepolymerization solution, and inject it into the electrode mold, such as Figure 4 , after curing the copolyester prepolymerization solution containing carbon nanotubes in a v...

Embodiment 1

[0060] In this embodiment, according to the above-mentioned preparation method, a flexible pressure tactile sensor with the following dimensions is prepared. The first planar excitation electrode 11 and the second planar excitation electrode 21 have the same size and size, with a length of 13.1 mm and a width of 7.1 mm. The height is 0.15mm; the thickness of the first flexible substrate 11 and the second flexible substrate 12 is 0.04mm; the first tip structure 31 is in the shape of a large pyramid, and the length and width of the bottom of the large pyramid are 1mm and 1mm in height. 1mm, the second tip structure 32 is a small pyramid shape, the length and width of the small pyramid-shaped base are 0.5mm, and the height is 0.5mm; the first tip structures 31 are arranged and fixed according to the 0.4mm gap equidistant On the first planar excitation electrode 21, and the total width of the array extension dimension is 0.2 mm smaller than the width of the first planar excitation ...

Embodiment 2

[0062] The preparation method of the flexible pressure tactile sensor prepared in this example is the same as that in Example 1, except that the size of the prepared flexible pressure tactile sensor is different.

[0063] Specifically, the sensor of an embodiment of the present invention is based on the two-dimensional finite element simulation of COMSOL as follows: Figure 9 to Figure 16 A schematic diagram showing the simulation performance of an embodiment of the present invention, Figure 9Describes the two-dimensional simulation model diagram when the first tip structure 311 is in the shape of a large pyramid and the second tip structure 321 is in the shape of a small pyramid. It is mainly composed of three parts: the top shield layer, the electrode layer, and the dielectric layer. It is easy to converge for simulation , we connect the bottom of the pyramid to the thin layer, and form a dielectric layer as a whole, and scan the parameters of the height a of the large pyra...

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Abstract

The invention discloses a flexible pressure sensor and a preparation method thereof, a sensing system and flexible electronic skin. The flexible pressure sensor comprises a first electrode layer and asecond electrode layer which are oppositely arranged in parallel; a first dielectric layer is arranged on the inner side of the first electrode layer and is provided with array type first tip structures, and a second dielectric layer is arranged on the inner side of the second electrode layer and is provided with array type second tip structures; when a flexible pressure tactile sensor is pressed, the first tip structures are extruded by at least two adjacent second tip structures; and the top ends of the first tip structures make contact with the horizontal plane of a second planar excitation electrode, and the top ends of the second tip structures are suspended. According to the structure, by changing materials and designing and arranging the dielectric layer structures, the defect thatthe recovery time is long due to the viscous effect is overcome, and higher detection sensitivity and higher response speed are achieved.

Description

technical field [0001] The invention relates to the field of pressure tactile sensors, in particular to a flexible pressure sensor, a preparation method, a sensing system, and a flexible electronic skin. Background technique [0002] In recent years, the application fields of intelligent robots have become more and more extensive. As a way for intelligent robots to perceive the external environment, various forms of flexible sensors have attracted extensive attention from scholars at home and abroad. With the industrial application of robots and the high-precision operation requirements of some industries, the requirements for the production of robots are becoming more and more stringent. Therefore, as an important branch of robot tactile sensors, flexible pressure tactile sensors tend to pursue faster response speed, higher sensitivity, wider detection range, higher resolution, better durability etc. [0003] At present, there has been some research on flexible pressure-s...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/14B29C39/00B29C39/02
CPCG01L1/146G01L1/148B29C39/003B29C39/026
Inventor 潘俊毛善安郭小辉洪玮强邱雷李典武季芬芬王威韩磊王科郑满莹苏雅鑫程园施婧
Owner HEFEI AICHUANGWEI ELECTRONIC TECH CO LTD
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