A circuit for triggering an excimer laser to generate plasma

An excimer laser and plasma technology, which is applied to lasers, phonon exciters, laser parts, etc., can solve the problem of reducing the performance of excimer lasers, the high-voltage pulse signal does not have a fast frontier, and the time synchronization of excimer lasers cannot be achieved. and other problems to achieve the effect of reducing signal jitter, removing noise interference, and reducing jitter
CN112787209BActive Publication Date: 2022-04-22HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
6 Cites 0 Cited by

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
Publication Date
2022-04-22

Smart Images

  • Figure 1
    Figure 1
  • Figure 2
    Figure 2
  • Figure 3
    Figure 3
Patent Text Reader

Abstract

The invention relates to the field of excimer lasers, in particular to a circuit for triggering excimer lasers to generate plasma. It includes a device for triggering the excimer laser and a pulse circuit for driving the excimer laser; the device for triggering the excimer laser includes a signal acquisition module and an electrical signal processing module; the pulse circuit for driving the excimer laser includes a trigger pulse The circuit, the trigger pulse circuit includes a first power supply unit for supplying power to the trigger terminal of the gas laser; the first power supply unit includes a tenth capacitor, a charging power source for charging the tenth capacitor. Therefore, the present invention can ensure that the time when the seed light reaches the excimer laser is synchronized with the discharge of the excimer laser. Therefore, under the interaction of the transistor and the tenth capacitor, the present invention can generate a high-voltage pulse signal with fast leading edge and low jitter for the excimer laser, so as to ensure the working performance of the excimer laser.
Need to check novelty before this filing date? Find Prior Art

Description

Technical field

[0001] The present invention relates to the field of excimer lasers, specifically to a circuit for triggering an excimer laser to generate plasma. Background

[0002] Excimer lasers are currently the laser devices with the largest output power in the ultraviolet band, which are widely used in industry, medical, scientific research and other fields. After decades of research and development, excimer laser technology has been rapidly developed, especially the rare gas halide excimer laser, due to its output laser peak power is high, pulse energy is large, wavelength in the ultraviolet region characteristics, rapid development and has been widely used, is currently the main use of excimer lasers. To meet the needs of some special applications, such as semiconductor lithography, high-power processing, ultrafast laser output, etc., excimer laser amplifiers in excimer lasers are required. An excimer is an unstable association that dissociates into atoms in the excited ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More