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A circuit for triggering an excimer laser to generate plasma

An excimer laser and plasma technology, which is applied to lasers, phonon exciters, laser parts, etc., can solve the problem of reducing the performance of excimer lasers, the high-voltage pulse signal does not have a fast frontier, and the time synchronization of excimer lasers cannot be achieved. and other problems to achieve the effect of reducing signal jitter, removing noise interference, and reducing jitter

Active Publication Date: 2022-04-22
HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Existing circuits for triggering excimer lasers to generate plasma, because the time synchronization between the discharge and the seed light reaching the excimer laser and the output high-voltage pulse signal does not have a fast front, the performance of the excimer laser is reduced

Method used

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  • A circuit for triggering an excimer laser to generate plasma
  • A circuit for triggering an excimer laser to generate plasma
  • A circuit for triggering an excimer laser to generate plasma

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0057] A device for triggering an excimer laser, which comprises the following components:

[0058] Signal acquisition module for collecting the trigger signal of the beam laser 9 that sends seed light to the gas laser 4;

[0059]Electrical signal processing module 2, for receiving and processing the trigger signal of the beam laser 9 collected by the signal acquisition module, and the processed trigger signal is input to the enable end of the gas laser 4, so that the time for the seed light to reach the gas laser 4 is synchronized with the discharge time of the gas laser 4; the discharge time of the gas laser 4 is controlled by the enable end of the gas laser 4.

[0060] The signal acquisition module comprises a fiber optic receiver F1 and a first conversion unit 1; the trigger signal of the beam laser 9 is input to the photoresistor of the optical fiber receiver F1 in the form of an optical signal; the output terminal of the optical fiber receiver F1 is electrically connected t...

Embodiment 2

[0078] In the basic line of Example 1, the following are described separately:

[0079] as Figure 1 and Figure 2 As shown, the signal acquisition module comprises a fiber optic receiver F1 of model R2526 and a first conversion unit 1. The first conversion unit 1 includes a first FET Q1, a first resistor R1, a second resistor R2, a third resistor R3. The output of the fiber optic receiver F1 is connected to the gate of the first FET Q1, the drain of the first FET Q1 is connected to the 5V DC voltage through the second resistor R2, and the source of the first FET Q1 is grounded. The drain of the first FET Q1 is also connected as the output to the input of the electrical signal processing module 2 through the third resistor R3, the fiber optic receiver F1 is used as the pin 1 of the output terminal through the gate of the first resistor R1 and the first FET Q1, pin 1 of the fiber optic receiver F1 is also connected to pin 4, and the first capacitor C1 is connected between pin 1 and ...

Embodiment 3

[0085]On the basis of Examples 1 and 2, the first conversion unit 1, optical fiber receiver F1, the second electrical signal connector 8 is removed from Example 2, and the following components are added:

[0086] Signal generator 5 for outputting a signal that coincides with the trigger signal of the beam laser 9;

[0087] Second conversion unit 6 for outputting potentials that are different from the potential at the output of signal generator 5;

[0088] Fiber optic transmitter F2, for converting the potential output of the second conversion unit 6 into an optical signal, which is transmitted to the beam laser 9 for triggering the beam laser 9 to generate seed light.

[0089] The first output of the signal generator 5 is connected to the 555 timer F3 in the electrical signal processing module 2 as the input pin 6 and pin 2, the second output of the signal generator 5 is connected to the input terminal of the second conversion unit 6; the output of the second conversion unit 6 is...

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Abstract

The invention relates to the field of excimer lasers, in particular to a circuit for triggering excimer lasers to generate plasma. It includes a device for triggering the excimer laser and a pulse circuit for driving the excimer laser; the device for triggering the excimer laser includes a signal acquisition module and an electrical signal processing module; the pulse circuit for driving the excimer laser includes a trigger pulse The circuit, the trigger pulse circuit includes a first power supply unit for supplying power to the trigger terminal of the gas laser; the first power supply unit includes a tenth capacitor, a charging power source for charging the tenth capacitor. Therefore, the present invention can ensure that the time when the seed light reaches the excimer laser is synchronized with the discharge of the excimer laser. Therefore, under the interaction of the transistor and the tenth capacitor, the present invention can generate a high-voltage pulse signal with fast leading edge and low jitter for the excimer laser, so as to ensure the working performance of the excimer laser.

Description

Technical field [0001] The present invention relates to the field of excimer lasers, specifically to a circuit for triggering an excimer laser to generate plasma. Background [0002] Excimer lasers are currently the laser devices with the largest output power in the ultraviolet band, which are widely used in industry, medical, scientific research and other fields. After decades of research and development, excimer laser technology has been rapidly developed, especially the rare gas halide excimer laser, due to its output laser peak power is high, pulse energy is large, wavelength in the ultraviolet region characteristics, rapid development and has been widely used, is currently the main use of excimer lasers. To meet the needs of some special applications, such as semiconductor lithography, high-power processing, ultrafast laser output, etc., excimer laser amplifiers in excimer lasers are required. An excimer is an unstable association that dissociates into atoms in the excited ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01S3/097
CPCH01S3/09702H01S3/09705H01S3/09707
Inventor 游利兵方晓东王宏伟杨礼昭
Owner HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
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