Component prepared from laser processing diamond material and preparation method of component

Abstract

The invention discloses a method for preparing a component by processing a diamond material through laser. The method adopts following devices: a laser device, a light beam shutter for controlling the output of the laser device, and a workbench for placing a diamond, a focusing lens is arranged between a laser head of the laser device and the workbench; laser emitted by the laser device is irradiated on the diamond through the focusing lens; the laser is focused on the surface or inside the diamond by controlling the relative movement of a laser spot and the workbench; and the diamond material in a laser radiation area is converted into a graphite phase and an amorphous carbon phase by adjusting the output power of the laser device, the pulse repetition frequency of laser output and the three-dimensional moving speed of the laser spot relative to the workbench, and the conductivity and the electromagnetic wave transmittance of the material in the laser radiation area are changed. The invention further discloses a component prepared by the method. Various devices such as an electromagnetic wave modulator, a resistor and a capacitor which are freely designed can be processed on the surface and the interior of the diamond.

Description

technical field [0001] The invention relates to an electromagnetic wave modulation device and a preparation method thereof, in particular to a component prepared by laser processing diamond material and a preparation method thereof. Background technique [0002] At present, laser technology continues to develop, and its application has penetrated into the fields of material science, optoelectronic devices, 3D printing, and biomedicine. Compared with the long-pulse laser, the pulse width of the ultrashort-pulse laser is extremely short. When the laser is applied to the target material, no significant damage will occur near the focus area, and the effects of heat conduction in a short period of time can be ignored. With the development of science and technology, microelectronics technology has significantly promoted the development of the information society. At present, silicon materials still occupy more than 90% of the field of semiconductor materials, and the new generatio...

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Problems solved by technology

[0003] Some components such as electromagnetic wave modulators are mainly realized based on the photolithography technology of Si substrate, such as the Chinese invention patent with application number 202010166069.7. This technology is etched on the Si surface, and the structure realizes the modulation of electromagnetic waves. The transmittance of electromagnetic waves is low. In addition, the etching structure is limited by the processing accuracy and the structure itself. It is difficult to achieve a high modulation depth for the electromagnetic waves of the target band.

Another example is the Chinese patent application with application numbers 201911264503.9 and 201810223513.7, which discloses an electromagnetic wave modulator that electrically induces changes in substrate conductivity or carrier concentration. However, the range of change in substrate material conductivity or carrier concentration Limited, unable to achieve complete phase change, thus restricting the modulation depth of the modulator

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