Preparation method of nano cerium oxide-graphene composite particles

Abstract

The invention relates to the technical field of semiconductor material preparation, in particular to a preparation method of nano cerium oxide-graphene composite particles. The preparation method of nano cerium oxide-graphene composite particles comprises the following steps: (1) preparing cerium oxide micro powder; (2) preparing a cerium oxide suspension; (3) preparing a graphene suspension; (4) preparing a cerium oxide-graphene composite particle crude product; and (5) calcining the cerium oxide-graphene composite particle crude product. The cerium oxide in the nano cerium oxide-graphene particles prepared by the method is well compounded on the surface of the graphene, the particle size of the cerium oxide is controllable in a range of 10-5000nm, the particle size distribution is narrow, and the cerium oxide is easy to disperse; and the composite particles can be applied to chemical-mechanical polishing and dispersing of polishing liquid in the field of semiconductors.

Description

technical field [0001] The invention relates to the technical field of semiconductor material preparation, in particular to a preparation method of nano cerium oxide-graphene composite particles. Background technique [0002] Rare earth elements have a unique outer electronic structure, and their high-purity rare earth oxides can be used in high-energy magnetic devices, light-emitting devices, fuel cells, polishing materials, catalysts and other functional materials, so they are also called industrial "monosodium glutamate". my country's rare earth resources are very rich, accounting for more than 80% of the world's proven reserves, and the industrial reserves rank first in the world, providing unique conditions for the development of my country's rare earth industry. As an important rare earth nano-oxide, cerium oxide is widely used in chemical mechanical polishing, automobile exhaust purification, fuel cells and other fields due to its good oxygen storage capacity and spec...

AI Technical Summary

Problems solved by technology

High-purity nano-cerium oxide particles are mainly used in high-performance fuel cells, and will not bring in other metal impurity ions, which will affect the performance of fuel cells; they are also used in high-end polishing fields that require particularly high metal impurity ions, high-purity Nano cerium oxide powder is used as a polishing abrasive material for polishing liquid, does not bring in metal impurity ions, and can undergo surface oxidation reactions with polished parts such as single crystal silicon, thereby obtaining a very high polishing removal rate, and nano cerium oxide has no Obvious protruding edges and corners will not scratch the surface of the polished piece, and it is easier to obtain a high-level surface; but cerium oxide itself is soluble in water, and the resulting polishing liquid is easy to settle, thereby affecting the polishing effect, while graphene and After cerium oxide is compounded, it can effectively solve the problem of cerium oxide dispersion in water

[0003] Domestic universities, research institutes and rare earth material companies try to prepare high-purity nano-cerium oxide particles by various methods, such as: CN201110232978.7, CN201910232788. These high-purity nano-cerium oxide preparation methods have many steps and complicated procedures. Introduce impurities, so that nano-cerium oxide-graphene composite particles cannot be produced, and the above-mentioned prior art needs to calcine the powder to make the particle crystal growth complete, high-temperature calcination will make the particles grow up, and it is impossible to obtain nano-scale particles, and graphene will also decompose because it cannot withstand high temperature, so that cerium oxide particles cannot attach to the surface of graphene

Images