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Sample preparation method of molybdenum scraps in glow discharge mass spectrometry

A technology of glow discharge mass spectrometry and conductive substrates, which is applied in the preparation of test samples, material analysis by electromagnetic means, and measurement devices. Accuracy and reduction of analysis time

Pending Publication Date: 2021-06-25
KONFOONG MATERIALS INTERNATIONAL CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The pre-testing method directly compresses the sample into a sheet shape, and materials with higher hardness cannot be used, and there are higher requirements for the shape of the sample to be tested

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0051] The present embodiment provides a kind of sample preparation method of molybdenum dust in glow discharge mass spectrometry, and described sample preparation method comprises the following steps:

[0052] Put the molybdenum chips to be tested in the blind hole of the indium disc, and then press the tablet in the press to complete the sample preparation of the molybdenum chips; the purity of the indium disc is 5N; the diameter of the blind hole is 0.7mm, and the depth is 0.3mm; The pressure of described tabletting is 10MPa, and the time is 12min;

[0053] The indium disc is an indium disc pretreated by the following method:

[0054] (1) Use high-purity tantalum to process blind holes on the surface of the indium wafer; the purity of the high-purity tantalum is 5N;

[0055] (2) Carrying out the first cleaning and alcohol washing of the disc indium after the blind hole is processed, and air-drying to obtain the indium disc; the first cleaning is sequentially pickling and d...

Embodiment 2

[0059] The present embodiment provides a kind of sample preparation method of molybdenum dust in glow discharge mass spectrometry, and described sample preparation method comprises the following steps:

[0060] Place the molybdenum chips to be tested in the blind hole of the indium disc, and then press the tablet in the press to complete the sample preparation of the molybdenum chips; the purity of the indium disc is 5N; the diameter of the blind hole is 0.65mm, and the depth is 0.25mm; The pressure of described tabletting is 9MPa, and the time is 14min;

[0061] The indium disc is an indium disc pretreated by the following method:

[0062] (1) Use high-purity tantalum to process blind holes on the surface of the indium wafer; the purity of the high-purity tantalum is 5N;

[0063] (2) Carrying out the first cleaning and alcohol washing of the disc indium after the blind hole is processed, and air-drying to obtain the indium disc; the first cleaning is sequentially pickling an...

Embodiment 3

[0067] The present embodiment provides a kind of sample preparation method of molybdenum dust in glow discharge mass spectrometry, and described sample preparation method comprises the following steps:

[0068] Put the molybdenum chips to be tested in the blind hole of the indium disc, and then press the tablet in the press to complete the sample preparation of the molybdenum chips; the purity of the indium disc is 5N; the diameter of the blind hole is 0.75mm, and the depth is 0.35mm; The pressure of described tabletting is 11MPa, and the time is 10min;

[0069] The indium disc is an indium disc pretreated by the following method:

[0070] (1) Use high-purity tantalum to process blind holes on the surface of the indium wafer; the purity of the high-purity tantalum is 5N;

[0071] (2) Carrying out the first cleaning and alcohol washing of the disc indium after the blind hole is processed, and air-drying to obtain the indium disc; the first cleaning is sequentially pickling and...

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Abstract

The invention provides a sample preparation method of molybdenum scraps in glow discharge mass spectrometry, which comprises the following steps of: placing molybdenum scraps to be detected in a blind hole of a conductive substrate, and then tabletting to complete sample preparation of the molybdenum scraps. According to the invention, a blind hole is formed in a conductive substrate, and molybdenum chips are subjected to sample preparation by using the blind hole of the conductive substrate, so that the pollution possibly caused by the sample is reduced, and the accuracy of detection data is improved; and the sample preparation success rate of the sample preparation method can reach 95% or above.

Description

technical field [0001] The invention belongs to the technical field of semiconductors and relates to a sample preparation method, in particular to a sample preparation method for molybdenum chips in glow discharge mass spectrometry. Background technique [0002] Molybdenum is a silver-white metal with a melting point of 2620°C. Due to the strong bonding force between atoms, the strength of molybdenum is very high at room temperature and high temperature. Molybdenum has a small expansion coefficient, high electrical conductivity, and good thermal conductivity. It does not react with hydrochloric acid, hydrofluoric acid, and alkali solutions at room temperature, and is only soluble in nitric acid, aqua regia, or concentrated sulfuric acid. It is suitable for most liquid metals and nonmetals. Slag and molten glass are also quite stable. Therefore, molybdenum and its alloys have wide applications and good prospects in important sectors such as metallurgy, agriculture, electrici...

Claims

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Application Information

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IPC IPC(8): G01N27/68G01N1/28G01N1/34
CPCG01N27/68G01N1/28G01N1/34
Inventor 姚力军边逸军潘杰王学泽叶科奇钟伟华
Owner KONFOONG MATERIALS INTERNATIONAL CO LTD
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