Flexible perovskite solar cell with high power mass ratio and preparation method thereof

A solar cell and perovskite technology, applied in circuits, photovoltaic power generation, electrical components, etc., can solve problems such as spontaneous curling of ultra-thin films, and achieve the effects of improved photoelectric conversion efficiency, low manufacturing cost, and small quality

Active Publication Date: 2021-07-30
PEKING UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The parylene material substrate used in the present invention is prepared by chemical vapor deposition (CVD), and a dense and uniform film can be obtained in the thickness range of 0.1 to 100 μm, and its deposition process based on a smooth substrate can solve the problem of spontaneous generation of ultra-thin films. curl problem

Method used

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  • Flexible perovskite solar cell with high power mass ratio and preparation method thereof
  • Flexible perovskite solar cell with high power mass ratio and preparation method thereof

Examples

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Embodiment example 1

[0033] (1) Immerse the glass substrate in detergent for ultrasonic cleaning, then rinse off the detergent with deionized water, and then immerse it in deionized water, acetone and isopropanol for ultrasonic cleaning.

[0034] (2) Deposit a Parylene-C thin film on a glass substrate with a thickness of 2 μm.

[0035] (3) The surface roughness of the Parylene film is improved by using ion beam polishing technology, and the surface roughness of the film surface is controlled below 8nm.

[0036] (4) Coating a Ni metal layer on the surface of the polished Parylene-C film with a thickness of 200nm.

[0037] (5) Spin-coat photoresist on the Ni metal layer, perform photolithography after pre-baking and curing.

[0038] (6) Obtain the grid pattern formed by the photoresist by developing after photolithography.

[0039](7) Remove unnecessary metal parts by wet etching to form a conductive metal grid.

[0040] (8) Wash away the photoresist.

[0041] (9) Sputter a layer of ITO with a t...

Embodiment example 2

[0048] (1) Immerse the glass substrate in detergent for ultrasonic cleaning, then rinse off the detergent with deionized water, and then immerse it in deionized water, acetone and isopropanol for ultrasonic cleaning.

[0049] (2) Deposit a Parylene-C thin film on a glass substrate with a thickness of 2 μm.

[0050] (3) The surface roughness of the Parylene film is improved by using ion beam polishing technology, and the surface roughness of the film surface is controlled below 8nm.

[0051] (4) Coating a Ni metal layer on the surface of the polished Parylene-C film with a thickness of 200nm.

[0052] (5) Spin-coat photoresist on the Ni metal layer, perform photolithography after pre-baking and curing.

[0053] (6) Obtain the grid pattern formed by the photoresist by developing after photolithography.

[0054] (7) Remove unnecessary metal parts by wet etching to form a conductive metal grid.

[0055] (8) Wash away the photoresist.

[0056] (9) Sputter a layer of ITO with a ...

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Abstract

The invention discloses a flexible perovskite solar cell with a high power mass ratio and a preparation method thereof. According to the invention, a Palilin film with a thickness of less than 5 [mu]m is prepared by using a chemical vapor deposition method and an ion beam polishing technology to serve as a flexible substrate, and then a transparent conductive functional layer composed of a metal grid and a transparent conductive oxide and other functional layers of the perovskite solar cell are prepared on the flexible substrate; the photoelectric conversion efficiency of the obtained flexible perovskite solar cell can exceed 20%, the power mass ratio can exceed 30 W / g, the bending radius can be smaller than 1 mm, and the performance degradation of the cell after 300 cycles of bending is smaller than 5%. The flexible perovskite solar cell with the high power mass ratio provided by the invention has the characteristics of small mass, high flexibility and very high power mass ratio, has great application potential in the fields of aerospace and the like, and also has unique advantages in the fields of intelligent equipment, wearable equipment and the like.

Description

technical field [0001] The invention belongs to the field of photoelectric functional devices, in particular to a flexible perovskite solar cell and a preparation method thereof. Background technique [0002] Due to its unique advantages over traditional rigid solar cells, such as small weight, low unit material consumption, flexibility, bendability, and stretchability, flexible solar cells have urgent needs in aerospace, military equipment and other fields. There are also broad application prospects in civil fields such as equipment. The power-to-mass ratio is a very important parameter for flexible solar cells, which indicates the power generation capacity of solar cells per unit mass. Taking aerospace and other fields that are very sensitive to quality as an example, a high power-to-mass ratio means that less launch mass can be occupied, more electric energy can be generated, and more fuel and equipment can be loaded. Therefore, the pursuit of power-to-mass ratio is The...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L51/46H01L51/44H01L51/42H01L51/48
CPCH10K71/00H10K71/80H10K77/111H10K30/30H10K2102/00Y02E10/549Y02P70/50
Inventor 朱瑞李雷喻茂滔陈鹏龚旗煌
Owner PEKING UNIV
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