The invention discloses a preparation method for an ultrathin flexible
crystalline silicon battery. In the method, a CFZ
silicon chip, an MCZ
silicon chip or an FZ
silicon chip is introduced as a substrate, a texturing sheet with a thickness less than 100 [mu]m is prepared through texturing
thinning, a PN junction is prepared by use of a routine high temperature diffusing method, after cleaning, Al2O3 is plated through a
microwave type flat PECVD to be taken as a back-surface passivating film, after the front surface and the back surface of the
silicon chip is plated with a SiNx reflection reduction film and a protective film, an
electrode contact window is opened by use of a
laser film opening method, a novel
electrode structure pattern is introduced, through
process improvement, an aluminum back conducting layer whose aluminum
slurry thickness is very small, a front
electrode and a back electrode are prepared by use of a
screen printing method, the ultrathin high-efficiency
crystalline silicon battery with excellent
electrical performance is formed through
sintering, and a miniaturized battery which facilitates
assembly packaging and has high reliability is formed through
cutting by use of a
laser cutting method. According to the ultrathin flexible
crystalline silicon battery prepared by use of the preparation method, a majority of process steps can be finished on a routine crystalline silicon battery
production line, the power-
mass ratio is high, the battery is suitable for a low-altitude aircraft, the preparation cost is quite low, and the application prospect is wide.