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Production method of electronic-grade hydrochloric acid

A production method and electronic-grade technology, applied in chemical instruments and methods, halogen/halogen acid, chlorine/hydrogen chloride purification, etc., can solve the problem of low product purity and achieve high product purity, simple equipment, and low energy consumption.

Active Publication Date: 2021-08-27
华融化学(成都)有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Even with the cleanest activated carbon, the Fe 2+ The concentration of ions must also exceed 5ppm. In addition, the absorption tower adopts a graphite falling film absorption tower, which will bring in a large amount of impurities after absorption, resulting in low product purity.

Method used

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  • Production method of electronic-grade hydrochloric acid
  • Production method of electronic-grade hydrochloric acid

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0035] (1) Pass 500L of hydrogen chloride gas into the pre-washing tower with 100kg, 2% tin protochloride solution, and carry out washing and dechlorination.

[0036] (2) After dechlorination, pass through a rough washing tower with 100kg of reagent grade hydrochloric acid for rough washing, and after rough washing, pass through 5°C frozen brine and a demister to remove water vapor.

[0037] (3) After removing water vapor, enter the fine washing tower with 100kg of high-purity hydrochloric acid (EL grade). Pure water absorbs hydrogen chloride gas, and after the absorption reaches 37%, it passes through two-stage precision filters to obtain the finished product of electronic grade hydrochloric acid.

Embodiment 2

[0039] (1) Pass 500L of hydrogen chloride gas into the pre-washing tower with 100kg, 2% tin protochloride solution, and carry out washing and dechlorination.

[0040] (2) After dechlorination, pass through a rough washing tower with 100kg of reagent grade hydrochloric acid for rough washing, and after rough washing, go through -25°C frozen brine and a demister to remove water vapor.

[0041] (3) After removing water vapor, it enters the fine washing tower with 100kg of high-purity hydrochloric acid (EL grade). After fine washing, it is condensed again by -25°C frozen brine, and then the excess water is removed by a demister, and finally it is used in a circulating absorption tower. 18MΩ.cm ultra-pure water absorbs hydrogen chloride gas, and after the absorption reaches 37%, it passes through two-stage precision filters to obtain electronic grade hydrochloric acid products.

Embodiment 3

[0043] (1) Pass 500L of hydrogen chloride gas into the pre-washing tower with 100kg, 5% tin protochloride solution, and carry out washing and dechlorination.

[0044] (2) After dechlorination, pass through a rough washing tower with 100kg of reagent grade hydrochloric acid for rough washing, and after rough washing, go through -35°C frozen brine and a demister to remove water vapor.

[0045] (3) After removing water vapor, enter the fine washing tower with 100kg of high-purity hydrochloric acid (EL grade). After fine washing, it will be condensed through -35°C frozen brine again, and then use the demister to remove excess water, and finally pass through the hydrogen chloride circulation absorption tower. The gas, after absorbing up to 37%, passes through the two-stage precision filter to obtain the finished product of electronic grade hydrochloric acid.

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Abstract

The invention discloses a production method of electronic-grade hydrochloric acid. The production method comprises the following steps: (1) removing free chlorine in hydrogen chloride gas by adopting a reducing agent; (2) treating the hydrogen chloride gas from which the free chlorine is removed in the step (1) by adopting an acidic solution, and condensing and demisting; and (3) treating the demisted hydrogen chloride gas in the step (2) by adopting an acidic solution, condensing, then introducing into water for cyclic absorption, and carrying out two-stage filtration. The metal impurities in the hydrogen chloride gas are removed in a multi-stage washing mode, moisture in the gas is removed through condensation, finally, the electronic-grade hydrochloric acid obtained through absorption and filtration is high in purity, low in impurity content and more stable in product quality, the process is simple and convenient to operate, compared with a traditional rectification process, the energy consumption is low, pollution is avoided, the use cost is low, and the method is worthy of industrial popularization.

Description

technical field [0001] The invention relates to the field of production of electronic grade chemical reagents, in particular to a production method of electronic grade hydrochloric acid. Background technique [0002] Hydrochloric acid, commonly known as hydrochloric acid, is an aqueous solution of hydrogen chloride (HCl) gas and is a colorless and transparent monobasic strong acid. Hydrochloric acid is extremely corrosive and volatile, so when you open the container containing concentrated hydrochloric acid, you can see white mist above it, which is actually small hydrochloric acid droplets produced by the combination of hydrogen chloride volatilization and water vapor in the air. As one of the important strong acids, hydrochloric acid can react with many metals and dissolve the metals. It is often used in the large-scale integrated circuit manufacturing industry, such as high-temperature vapor phase etching of silicon and gallium arsenide before epitaxial growth, and cleani...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B7/07
CPCC01B7/0706
Inventor 刘鹏程罗小容
Owner 华融化学(成都)有限公司
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