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Cleaning method for intermediate layer of target material assembly

A technology of intermediate layers and components, applied in the direction of cleaning methods using liquids, cleaning methods and utensils, chemical instruments and methods, etc., can solve problems such as inaccessibility and singleness, and achieve low cleaning costs, simple operation, and wide application range Effect

Pending Publication Date: 2021-10-15
KONFOONG MATERIALS INTERNATIONAL CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This method focuses on the pickling treatment of waste targets to improve the recycling rate of the targets, and a single pickling treatment cannot meet the requirements for direct use in welding

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0065] This embodiment provides a cleaning method for the middle layer of the target assembly, the cleaning method comprising the following steps:

[0066] (1) The middle layer to be cleaned is carried out ultrasonic cleaning with isopropanol and water successively. The material of the middle layer is titanium, and its shape is disc-shaped. The thickness of the middle layer is 3mm. The frequency is 50kHz, the temperature is 20°C, and the ultrasonic cleaning time is 5 minutes with isopropanol and water;

[0067] (2) The intermediate layer after step (1) is processed is carried out bubbling pickling, and the used pickling liquid of described bubbling pickling is the mixed solution of nitric acid, hydrofluoric acid and water, and the temperature of described bubbling pickling The temperature is 32°C, and the time is 2 minutes. During the bubbling pickling process, compressed air is passed into the pickling solution. After completion, the middle layer is soaked in water and washed...

Embodiment 2

[0070] This embodiment provides a cleaning method for the middle layer of the target assembly, the cleaning method comprising the following steps:

[0071] (1) The intermediate layer to be cleaned is ultrasonically cleaned with isopropanol and water successively. The material of the intermediate layer is titanium, and its shape is disc-shaped. The thickness of the intermediate layer is 2.6mm. The frequency is 42kHz, the temperature is 15°C, and the ultrasonic cleaning time is 6 minutes with isopropanol and water;

[0072] (2) The intermediate layer after step (1) is processed is carried out bubbling pickling, and the used pickling liquid of described bubbling pickling is the mixed solution of nitric acid, hydrofluoric acid and water, and the temperature of described bubbling pickling The temperature is 30°C and the time is 3 minutes. During the bubbling pickling process, compressed air is passed into the pickling solution. After completion, the middle layer is soaked in water ...

Embodiment 3

[0075] This embodiment provides a cleaning method for the middle layer of the target assembly, the cleaning method comprising the following steps:

[0076] (1) The middle layer to be cleaned is ultrasonically cleaned with ethanol and water successively. The material of the middle layer is titanium, and its shape is disc-shaped. The thickness of the middle layer is 3.5mm. The frequency is 60kHz, the temperature is 25°C, and the ultrasonic cleaning time is 4min with ethanol and water;

[0077] (2) Carry out bubbling pickling to the intermediate layer after step (1), the pickling solution used in the bubbling pickling is a mixed solution of nitric acid and water, and the temperature of the bubbling pickling is 35°C, The time is 1min. During the bubbling pickling process, compressed air is passed into the pickling solution. After completion, the middle layer is soaked in water and washed for 6 minutes;

[0078] (3) Ultrasonic water washing is performed on the intermediate layer a...

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Abstract

The invention provides a cleaning method for an intermediate layer of a target material assembly. The cleaning method comprises the following steps that the intermediate layer to be cleaned is subjected to ultrasonic cleaning through an organic solvent and water in sequence; bubbling acid pickling is conducted on the treated intermediate layer; and the treated intermediate layer is subjected to ultrasonic water cleaning again, and the cleaned intermediate layer of the target material assembly is obtained after drying. According to the method, the operations of ultrasonic cleaning, bubbling acid pickling and ultrasonic water cleaning are sequentially adopted according to the material and surface stains of the intermediate layer, impurities, dirt, oil stains, an oxide layer and the like on the surface of the intermediate layer are fully removed, the purity of the cleaned intermediate layer is high, and the compactness and uniformity of the welding face are ensured when the intermediate layer is used for diffusion welding. The welding strength of the target material assembly is improved. The method is easy to operate, low in cleaning cost, small in amount of generated waste liquid and wide in application range.

Description

technical field [0001] The invention belongs to the technical field of target preparation and relates to a method for cleaning the middle layer of a target component. Background technique [0002] With the rapid development of the semiconductor industry, as an important material for the manufacture of semiconductor electronic devices, the demand for coating materials is also increasing. As an important coating material, the target is widely used in the fields of integrated circuits, flat-panel displays, solar energy, and optical devices. The main preparation method is physical vapor deposition (PVD), and the most commonly used method is sputtering coating. . [0003] In the sputtering coating process, the target is generally not used alone, but in the form of a target assembly. The target assembly is usually composed of a target and a back plate. Due to the harsh working environment of the target assembly, it is necessary to use the target and The welding strength of the b...

Claims

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Application Information

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IPC IPC(8): B08B3/12B08B3/10B08B3/08B08B3/04F26B5/00F26B5/04F26B21/14
CPCB08B3/12B08B3/10B08B3/08B08B3/04F26B5/00F26B5/04F26B21/14B08B2203/007
Inventor 姚力军边逸军潘杰王学泽侯宇
Owner KONFOONG MATERIALS INTERNATIONAL CO LTD