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Wireless microfluidic sensor based on multilayer ceramic technology

A multi-layer ceramic and microfluidic technology, applied in the field of microfluidic technology and sensor research, can solve the problems of low integration of microfluidic channels and resonators, achieve functional integration, reduce device loss, and high chemical stability sexual effect

Pending Publication Date: 2022-01-04
SHANGHAI INST OF CERAMIC CHEM & TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Aiming at the problems of the existing microfluidic sensors based on microwave resonators, such as the low integration of microchannels and resonators, and the need to rely on SMA wired connection tests, the purpose of the present invention is to provide a wireless microfluidic sensor based on multilayer ceramic technology. sensor, realizing the integrated integration of liquid sensing and wireless communication, and also provides a new idea for the design of wireless microfluidic sensors

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  • Wireless microfluidic sensor based on multilayer ceramic technology
  • Wireless microfluidic sensor based on multilayer ceramic technology
  • Wireless microfluidic sensor based on multilayer ceramic technology

Examples

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Embodiment 1

[0039] Example 1: Preparation of wireless microfluidic sensor

[0040] (1) In Example 1, LTCC technology is used to prepare wireless microfluidic sensors (square SIW, side length a=28mm, total thickness h of the ceramic substrate is 0.8mm; diameter D=0.2mm of the metal through hole, pitch P=0.4mm , the length of the slot antenna L=17mm, width W=2mm, W p = 13mm). Firstly, holes are drilled on the surface of the LTCC green ceramic tape material, including the metal through holes of the substrate integrated waveguide resonator, the alignment holes of each stack, and the microchannel holes (a 0 = 20mm) and the fluid inlet and outlet; the silver electrode paste is printed on the surface of the perforated LTCC raw ceramic belt material according to the pattern of the slot pattern and the pattern of the full-scale electrode by the screen printing process, and then placed in an oven at 80 ° C. dry for use;

[0041] (2) The above green ceramic sheets perforated and printed with elec...

Embodiment 2

[0044] Example 2: Application of Wireless Microfluidic Sensors

[0045] (1) Since different fluids and different concentrations of the same fluid have their own characteristic dielectric constants, the present invention mainly uses the changes in the dielectric constant and conductivity of the fluid to be measured flowing through the microchannel to cause the resonant frequency and The working principle of the change of S11 amplitude is to realize the wireless detection of the type and concentration of the fluid to be measured by collecting and analyzing the S parameters of the wireless microfluidic sensor through the external reading antenna;

[0046] (2) Ethanol aqueous solutions with different concentrations are passed into the sensor from the fluid inlet (inlet) of the wireless microfluidic sensor prepared in Example 1 respectively, and after the liquid to be measured flows through the microchannel structure of the sensor, it flows from the fluid outlet (outlet) ) discharg...

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Abstract

The invention relates to a wireless microfluidic sensor based on a multilayer ceramic technology. The wireless microfluidic sensor based on the multilayer ceramic technology comprises a substrate integrated waveguide resonator, a slot antenna and a micro-channel structure integrated in the substrate integrated waveguide resonator.

Description

technical field [0001] The invention relates to a wireless microfluidic sensor based on multilayer ceramic technology, belonging to the field of microfluidic technology and sensor research. Background technique [0002] Microfluidic technology refers to the technology of manipulating fluid in micro-nano-scale channels. Microfluidic technology has important applications in instant diagnosis, cell analysis, biosensing, drug metabolism, environmental detection and other fields. As an important application field of microfluidic technology, chip-based microfluidic sensor research has attracted extensive attention from domestic and foreign academic and industrial circles in recent years, and has become a field involving analytical chemistry, fluid physics, biomedicine, electronic information and new technologies. Materials and other multi-disciplinary cutting-edge research fields. Traditional microfluidic sensors mostly use photodetection or chemical analysis to detect the liqui...

Claims

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Application Information

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IPC IPC(8): G01N27/06G01N27/22
CPCG01N27/06G01N27/221
Inventor 马名生何婷婷刘志甫
Owner SHANGHAI INST OF CERAMIC CHEM & TECH CHINESE ACAD OF SCI
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