Device and method for measuring atomic oxygen flux density
A technology of flux density and atomic oxygen, which is applied in the field of devices for measuring atomic oxygen flux density, can solve problems such as inaccurate measurement results, atomic oxygen side erosion, and environmental temperature sensitivity, so as to achieve accurate measurement, improve accuracy, and reduce Effect of Flux Density Bias
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Embodiment 1
[0061] Such as Figure 1-Figure 5 As shown, the tray 1, the interlayer 2 and the cover plate 3 of the device for measuring the atomic oxygen flux density are circular with a diameter of 160 mm. There are 48 first concave holes 11 on the tray 1. In this example, the first concave holes 11 are squares with a side length of 12 mm. The depth of the first concave hole 11 is 0.1 mm, consistent with the thickness of the interlayer 2, so as to reduce the deformation of the sample when the cover plate 3 and the tray 1 are tightened, thereby reducing the risk of the sample being subjected to side erosion by atomic oxygen.
[0062] The interlayer 2 is provided with a second concave hole 21, and the cover plate 3 is provided with a third concave hole 31. The second concave hole 21 and the third concave hole 31 are squares with a side length of 10 mm. The side length of the second concave hole 21 and the third concave hole 31 is 2 mm smaller than that of the first concave hole 11. By redu...
Embodiment 2
[0075] Such as Figure 6-Figure 10 As shown, the tray 1, the interlayer 2 and the cover plate 3 of the device for measuring the atomic oxygen flux density are circular with a diameter of 160 mm. There are 9 first concave holes 11 on the tray 1, and in this example, the first concave holes 11 are circular with a diameter of 32mm. The depth of the first concave hole 11 is 0.1 mm, consistent with the thickness of the interlayer 2, so as to reduce the deformation of the sample when the cover plate 3 and the tray 1 are tightened, thereby reducing the risk of the sample being subjected to side erosion by atomic oxygen.
[0076] The interlayer 2 is provided with a second concave hole 21 , and the cover plate 3 is provided with a third concave hole 31 , the second concave hole 21 and the third concave hole 31 are circular with a diameter of 30 mm. The diameter of the second concave hole 21 and the third concave hole 31 is 2 mm smaller than that of the first concave hole 11. By reduci...
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Abstract
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