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Dual-wavelength optical fiber line array dispersion confocal microscopic detection method and device

A dispersion confocal and optical fiber array technology, applied in the direction of measuring devices, optical devices, microscopes, etc., can solve the problems of only reaching kHz, complicated adjustment of slit detection conjugate optical path, complex optical path adjustment, etc., and achieve the focus spot size Small size, strong ability to adapt to the surface characteristics of the object, and high measurement accuracy

Inactive Publication Date: 2022-01-21
绍兴钜光光电科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the above method has the following defects in the device construction process: first, the adjustment of the slit detection conjugate optical path is extremely complicated, and the design of the double detection slit detector in the above method will further complicate the adjustment of the optical path; The displacement offset of a slit detector along the optical axis of the beam needs to be controlled in the order of microns, which puts forward extremely high requirements on the processing speed of mechanical parts.
However, the linear dispersion confocal technology puts forward higher requirements on the spectral resolution capability of the spectral imaging detection equipment, and the acquisition frequency is limited by the performance of the area array detector and usually can only reach about kHz to 10 kHz.

Method used

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  • Dual-wavelength optical fiber line array dispersion confocal microscopic detection method and device
  • Dual-wavelength optical fiber line array dispersion confocal microscopic detection method and device
  • Dual-wavelength optical fiber line array dispersion confocal microscopic detection method and device

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Embodiment 1

[0028] Such as image 3 As shown, the schematic diagram of the dual-wavelength optical fiber line array dispersion confocal microscopic detection device based on the imaging spectrometer used in this embodiment includes a dual-wavelength light source 1, an optical fiber array coupler 2 (including an illumination end optical fiber array 201, a coupling unit 202, Common end fiber array 203, detection end fiber array 204) arranged in a line, dispersive objective lens 3 (including achromatic lens 301, concave lens 302, first convex lens 303, second convex lens 304, third convex lens 305), wavelength splitter Device 5 (including spherical mirror 501, grating 502, spherical focusing mirror 503), detector 6 (including lambda 1 , lambda 2 Intensity detection area), fiber array flange 7, microprocessor 8. Among them, the dual-wavelength light source 1 emits wavelength lambda 1 and lambda 2 The optical fiber array coupler 2 emits the optical beam from the dual-wavelength light s...

Embodiment 2

[0032] Different from Embodiment 1, the acquisition of the displacement information of the measurement beam direction in this embodiment depends on the construction of the dual-wavelength differential optical fiber line array dispersion confocal response data[ dI 21 1 , dI 21 2 , dI 21 3 ,…, dI 21 M ] and the calibration relationship between the measured sample displacement. The optical fiber array coupler 2, dispersive objective lens 3, wavelength splitting device 5, detector 6 and other devices in the device of the present invention all have non-uniform spectral response characteristics, so that the difference between the dual-wavelength differential optical fiber line array dispersion confocal response data and the displacement of the measured sample The relationship between will deviate from the theoretical design, so it is necessary to accurately construct the calibration relationship between the dual-wavelength differential fiber line array dispersion confo...

Embodiment 3

[0034] Different from Embodiment 1, the wavelength splitting device 5 in this embodiment is composed of a collimating mirror 504, a dichroic beam splitting mirror 505, a first converging mirror 506, and a second converging mirror 507, such as Figure 7 shown. Its working principle is as follows: First, the collimating mirror 504 collimates the measuring beam emitted from the detection fiber array 204, and sends it into the dichroic beam splitter 505; lambda 1 and lambda 2 The light beams are separated and focused to the first linear array detector 601 and the second linear array detector 602 through the first converging mirror 506 and the second converging mirror 507 respectively; finally, the detector 6 (comprising the first linear array detector 601, The second linear array detector 602) obtains all M points at the illumination wavelength lambda 1 and lambda 2 The fiber line array dispersion confocal response intensity data below are [ I 1 1 , I 1 2 , I 1 3 ...

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Abstract

The invention relates to a dual-wavelength optical fiber line array dispersion confocal microscopic detection method and device, which belong to the field of optical imaging and detection, and can be used for rapidly measuring the surface topography of a micro-nano precise sample. Optical fiber line array confocal and objective lens axial dispersion are combined, a common optical fiber end line array is used as a slit to provide slit illumination and filter a measurement light beam reflected by a sample, and a wavelength light splitting device is used to separate light with different wavelengths in the measurement light beam to obtain an optical fiber line array dispersion confocal response intensity value under double illumination wavelengths, and displacement information of the sample surface along the optical axis direction of the measurement beam is obtained. A common end optical fiber line array is used as an illumination slit and a detection slit, so that the adjustment difficulty of a confocal optical path is reduced; a linear region with a relatively large slope of a linear dispersion confocal curve is used for replacing a vertex region with a zero slope in traditional linear dispersion confocal, so that the detection sensitivity and precision are remarkably improved. Therefore, a feasible way is provided for high-speed and high-precision measurement of the surface profile, morphology and the like of the micro-nano sample, and the method has important application prospects in the fields of chip manufacturing and the like.

Description

technical field [0001] The invention relates to a high-speed optical fiber line array dispersion confocal microscopic measurement method, which can be applied to various samples such as IC chips, MEMS, functionalized structure micro-nano devices, turning, milling, planing and milling surfaces, shot blasting surfaces, and wire drawing surfaces. The invention relates to rapid measurement of surface topography, which belongs to the technical field of optical imaging and detection. Background technique [0002] The line confocal microscope was proposed by the Soviet G. M. Svishchev in the late 1960s. Its basic structure is: use a pair of conjugate slits for illumination and detection, and precisely control mechanical movement devices such as high-precision motors or piezoelectric ceramics. The micro-objective lens moves along the optical axis, so that the displacement information of the measured sample along the optical axis can be obtained. Compared with the traditional point-...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/25G02B21/00G02B21/06G02B21/08
CPCG01B11/25G02B21/0032G02B21/06G02B21/08
Inventor 陈成杨佳苗沈阳
Owner 绍兴钜光光电科技有限公司