Preparation of discontinuous carbon film based on aluminum-nickel metal layer and application of discontinuous carbon film to respiration sensor

Abstract

The invention discloses preparation of a discontinuous carbon film based on an aluminum-nickel metal layer and application of a respiration sensor, and belongs to the technical field of carbon film preparation. In the preparation process of the carbon film, firstly, aluminum-nickel metal layers with different components are sputtered on the surface of a silicon-based substrate by a magnetron sputtering method, and part of nickel catalytic active sites are passivated by adding aluminum, so that the carbon film with a discontinuous structure is obtained after growth by a CVD (Chemical Vapor Deposition) method; and removing the aluminum-nickel catalytic metal layer on the silicon-based substrate by adopting a wet etching method to obtain the discontinuous carbon film directly falling on the substrate. A conductivity test carried out by evaporating a titanium electrode shows that the carbon film has relatively sensitive responsiveness to respiration, the device is changed from a non-conductive state to a conductive state when external humidity changes such as respiration, and the carbon film has relatively good response sensitivity and can be used for developing and preparing a wearable respiration monitoring device with high sensitivity and low power consumption.

Description

technical field [0001] The invention uses an aluminum-nickel metal layer as a growth catalyst, grows a layer of discontinuous carbon film with respiration responsiveness on a silicon-based chip by CVD method, and evaporates a metal electrode on the surface to make a simple respiration sensor for electrical performance testing. Through the conductivity test, it is found that the carbon film has a relatively sensitive response to respiration. In the study of the growth mechanism of aluminum-nickel metal-catalyzed discontinuous carbon film, the preparation of simple, low-power and high-sensitivity respiration sensor, and the optimization of the process of respiration devices and the improvement of devices Quality and other aspects are of great practical significance. Background technique [0002] Carbon is the sixth element in the periodic table and is widely distributed in the earth's crust. It is one of the elements that human beings came into contact with and used earlier. ...

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Problems solved by technology

In addition, graphene oxide (GO), a derivative of graphene, contains a variety of active oxygen functional groups such as epoxy, hydroxyl, carboxyl, etc., which is extremely hydrophilic and moisture sensitive, and is also a common moisture sensitive materials, Li et al. prepared a graphene oxide-based capacitive humidity sensor by a direct drop casting process, but the bonding between the graphene oxide film and the substrate is weak, so the adsorption capacity on the substrate is poor

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