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Lens-free focusing device and method of coherent array laser

A focusing device, laser technology, applied in laser devices, semiconductor laser devices, lasers, etc., can solve the problems of cracking, complex processing, large lens size, etc., and achieve the effect of eliminating complex manufacturing processes, cheap manufacturing processes, and simple and cheap

Active Publication Date: 2022-03-15
BEIJING UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

When using traditional lenses for focusing, it is easy to generate errors and high complexity when building the optical path; and when focusing on a large array of lasers, high-energy laser radiation radiates to the mirror surface, and the thermal stress on the lens will cause thermal distortion or even rupture of the lens; At the same time, the lens itself also has the defects of large size, heavy weight and complicated processing.

Method used

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  • Lens-free focusing device and method of coherent array laser
  • Lens-free focusing device and method of coherent array laser
  • Lens-free focusing device and method of coherent array laser

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preparation example Construction

[0051] Such as Figure 4 As shown, the present invention provides a method for preparing a lensless focusing device of a coherent array laser, comprising:

[0052] Depositing a binary optical microstructure substrate 2-1 on the output end of the coherent array laser 1;

[0053] calculating the thickness of each structural element in the binary optical microstructure 2-2, and etching the binary optical microstructure substrate 2-1 to form a step shape based on the thickness of each structural element;

[0054] filling the etched grooves of the binary optical microstructure substrate 2-1 to form a binary optical microstructure 2-2;

[0055] The binary optical microstructure 2-2 performs phase modulation on the in-phase coherent array beam output by the coherent array laser. The phase distribution of the array beam through the binary optical microstructure satisfies the discrete thin focusing lens phase transformation relationship. Finally, the coherent array laser can be obtained...

Embodiment 1

[0057] The invention discloses a lensless focusing method and device for a coherent array laser. The coherent array laser is a two-dimensional array laser that emits laser light from the semiconductor chip substrate level. The surface emitting laser array of the present embodiment consists of such as figure 2 The surface-emitting light-emitting units shown are arranged in a regular quadrilateral. After the binary optical microstructure is set at the output end of the coherent array laser, each sub-beam of the array beam is phase-modulated separately, and the phase delay function generated for each sub-beam satisfies the relational expression:

[0058]

[0059] The relationship between the thickness d of the structural micro-element and the coordinates of the structural micro-element arranged in a two-dimensional array, the equivalent focal length, the refractive index of the structural micro-element, the refractive index of the base material of the structural micro-element...

Embodiment 2

[0066] The invention discloses a lensless focusing method and device for a coherent array laser. The coherent array laser is a one-dimensional array laser that emits laser light from the edge of the active area of ​​a semiconductor chip. The edge-emitting laser array of the present embodiment consists of such as image 3 The edge-emitting light-emitting units shown are formed in a one-dimensional linear arrangement. After the binary optical microstructure is set at the output end of the coherent array laser, each sub-beam of the array beam is phase-modulated separately, and the phase delay function generated for each sub-beam satisfies the relational expression:

[0067]

[0068] The relationship between the thickness d of the structural micro-element and the coordinates of the structural micro-element arranged in a two-dimensional array, the equivalent focal length, the refractive index of the structural micro-element, the refractive index of the base material of the struc...

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Abstract

The invention discloses a lens-free focusing device and method for a coherent array laser. The lens-free focusing device comprises the coherent array laser, a binary optical microstructure substrate and a binary optical microstructure, the binary optical microstructure is arranged at the output end of the coherent array laser through the binary optical microstructure substrate, a structural infinitesimal of the binary optical microstructure, a structural infinitesimal substrate of the binary optical microstructure substrate and a laser unit of the coherent array laser correspond to each other up and down, and a focused beam is obtained after the phase modulation structure array. According to the invention, the binary optical microstructure is utilized, so that the array light beam generates phase delay, and the lens-free focusing effect is realized; meanwhile, the binary optical microstructure is prepared on the chip by adopting a semiconductor process technology, so that the limitations of complex manufacturing process, large size and heavy weight of a traditional lens and errors caused by an external light path are eliminated; the structure is simple, the preparation process is simple and cheap, and implementation is convenient.

Description

technical field [0001] The invention relates to the technical field of semiconductor laser chips, in particular to a lensless focusing device and method of a coherent array laser. Background technique [0002] With the development of laser technology, lasers with high power and high beam quality have become the pursuit of modern laser applications. However, single-aperture lasers cannot meet the demand for high-power lasers due to gain saturation effects, hole-burning effects, thermal effects and other factors. Therefore, the coherent combining array laser is one of the frontiers and hotspots of current high-power laser technology research. [0003] Focus transformation of laser beam is an effective means to control the distribution of laser energy, which is essential in the fields of laser welding, laser marking, laser surgery, laser weapons and so on. When using traditional lenses for focusing, it is easy to produce errors and high complexity when building the optical pa...

Claims

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Application Information

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IPC IPC(8): H01S5/00H01S5/40
CPCH01S5/0085H01S5/4025
Inventor 王智勇代京京兰天
Owner BEIJING UNIV OF TECH
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