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Manufacturing method of quartz ceramic crucible

A technology of quartz ceramics and production methods, which is applied in the field of quartz ceramics, can solve the problems that ceramic coatings are prone to cracking, easy to fall off and enter the interior of silicon materials, etc., and achieve good corrosion resistance and high temperature resistance, good durability, and process easy effect

Active Publication Date: 2022-03-25
东海县太阳光新能源有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Aiming at the problems in the prior art that ceramic coatings prepared from silicon nitride and silica sol are prone to cracking and easily fall off and enter the interior of the silicon material during high-temperature melt flow, the purpose of the present invention is to provide a Manufacturing method of quartz ceramic crucible

Method used

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  • Manufacturing method of quartz ceramic crucible

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Embodiment 1

[0044] A method for manufacturing a quartz ceramic crucible, comprising the following steps:

[0045] Step 1, preparing the quartz ceramic crucible body:

[0046] Mix quartz sand powder, binder, and deionized water with a particle size of 50-100 μm and a purity of not less than 99.99% into a ball mill at a mass ratio of 10:0.8:2.5, and use zirconia beads for ball milling. The ball-to-material ratio is 2.5:1, the ball milling speed is 300rpm, the ball milling time is 3h, and then pour the ball milled slurry into a plaster mold, dry at room temperature for 22h, dry at 80°C for 12h, and then sinter in a graphite furnace Treatment, that is, first raise the temperature to 325°C, heat preservation treatment for 1.5h, then heat up to 750°C, heat preservation treatment for 1.5h, then heat up to 1200°C, heat preservation treatment for 4h, and cool to room temperature with the furnace to obtain the quartz ceramic crucible body; , the binder is obtained by mixing silica sol and methyl c...

Embodiment 2

[0059] A method for manufacturing a quartz ceramic crucible, comprising the following steps:

[0060] Step 1, preparing the quartz ceramic crucible body:

[0061] Mix quartz sand powder, binder, and deionized water with a particle size of 50-100 μm and a purity of not less than 99.99% into a ball mill at a mass ratio of 10:0.5:2, and use zirconia beads for ball milling. The ball-to-material ratio is 2:1, the ball milling speed is 200rpm, the ball milling time is 2h, then the ball milled slurry is poured into a plaster mold, dried at room temperature for 20h, dried at 60°C for 15h, and then sintered in a graphite furnace Treatment, that is, first raise the temperature to 300°C, heat preservation treatment for 2 hours, then heat up to 750°C, heat preservation treatment for 2 hours, then heat up to 1100°C, heat preservation treatment for 5 hours, and cool to room temperature with the furnace to obtain a quartz ceramic crucible body; The binder is obtained by mixing silica sol an...

Embodiment 3

[0074] A method for manufacturing a quartz ceramic crucible, comprising the following steps:

[0075] Step 1, preparing the quartz ceramic crucible body:

[0076] Mix quartz sand powder, binder, and deionized water with a particle size of 50-100 μm and a purity of not less than 99.99% into a ball mill at a mass ratio of 10:1:3, and use zirconia beads for ball milling. The ball-to-material ratio is 3:1, the ball milling speed is 500rpm, the ball milling time is 4h, then pour the ball milled slurry into a plaster mold, dry at room temperature for 24h, dry at 100°C for 15h, and then sinter in a graphite furnace Treatment, that is, first raise the temperature to 350°C, heat preservation treatment for 2 hours, then heat up to 800°C, heat preservation treatment for 1 hour, then heat up to 1200°C, heat preservation treatment for 3 hours, and cool to room temperature with the furnace to obtain a quartz ceramic crucible body; The binder is obtained by mixing silica sol and methylcellu...

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Abstract

The invention discloses a quartz ceramic crucible manufacturing method, which comprises: 1, preparing a quartz ceramic crucible green body: carrying out ball milling on quartz sand powder, and carrying out slip casting to obtain the quartz ceramic crucible green body; step 2, preparing a compact coating liquid: weighing the silicon nitride / niobium silicide coated microspheres, and uniformly mixing the silicon nitride / niobium silicide coated microspheres with silica sol to prepare the compact coating liquid; and step 3, preparing the quartz ceramic crucible: coating the compact coating liquid on the surface of a quartz ceramic crucible green body, and drying to obtain the quartz ceramic crucible. The particle size of the quartz sand powder is 50-100 microns, and the purity of the quartz sand powder is not less than 99.99%. The method for preparing the quartz ceramic crucible is simple and convenient in process, and the prepared quartz ceramic crucible has better usability.

Description

technical field [0001] The invention relates to the field of quartz ceramics, in particular to a method for manufacturing a quartz ceramic crucible. Background technique [0002] Quartz ceramic crucibles are also called quartz glass ceramic crucibles, mostly square. Quartz ceramic crucible has the characteristics of fine structure, low thermal conductivity, small thermal expansion coefficient, high dimensional accuracy, no deformation at high temperature, good thermal shock stability, good electrical performance, and good chemical corrosion resistance. It is mainly used for polysilicon melting ingot casting . Quartz ceramic crucible is the key material of polysilicon ingot furnace, and it is used as a container for polysilicon raw materials. This kind of quartz ceramic crucible needs to work continuously for more than 50 hours at a high temperature above 1500°C to produce polysilicon ingots. [0003] When quartz ceramic crucibles are used for polysilicon melting ingots, d...

Claims

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Application Information

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IPC IPC(8): C04B35/14C04B35/622C04B41/87
CPCC04B35/14C04B35/622C04B41/87C04B41/5071C04B41/009C04B2235/656C04B2235/6567C04B41/5066C04B41/5035C04B41/4539C04B41/4543C04B41/0072
Inventor 吕金虎
Owner 东海县太阳光新能源有限公司
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