Double-layer chiral micro-nano structure and preparation method thereof
A micro-nano structure and chirality technology, applied in optics, instruments, optical components, etc., can solve the problem that the molecular self-assembly laser direct writing method cannot prepare nano-scale structural features, and it is difficult to prepare artificial chiral surface plasmon structures. It is difficult to solve the problem of high difficulty, and achieves the effect of good application prospect, flexible and convenient application, and simplified preparation process steps.
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[0031] Example 1
[0032] The present invention provides a double-layer chiral micro-structure structure, such as figure 1 As shown, including a substrate, a second noble metal layer, a transparent dielectric layer, and a first noble metal layer. The transparent medium layer is placed on the substrate, and the material of the substrate is a conductive glass, which is convenient for electron beam etching, so that the charge can be turned on unregistered in the etching sample due to charge aggregation. The material of the transparent medium layer is PMMA. The first precious metal layer is placed on the transparent dielectric layer, and the material of the first precious metal layer is silver or gold. Such as figure 2 As shown, the first noble metal layer and the transparent dielectric layer are provided with a penetrated L-shaped hole, that is, the L-shaped holes penetrate the first noble metal layer and the transparent dielectric layer to reach the surface of the substrate. The L-s...
Example Embodiment
[0034] Example 2
[0035] On the basis of Example 1, the thickness of the nano rod is smaller than the thickness of the transparent dielectric layer, so that there is a certain distance between the lower surface of the first noble metal layer and the upper surface of the nano rod, and the first noble metal layer is applied to the nanorod. Coupling is a circular seithlier of transmitted light. Preferably, the distance between the lower surface of the first noble metal layer and the upper surface of the nano rod is greater than 10 nanometers, less than 240 nm, to facilitate coupling between the film and the nanorod.
Example Embodiment
[0036] Example 3
[0037] Based on Example 2, a double chiral micro-structure having a specific morphological parameter was designed, and the transmissive spectrum, circular chromogenic spectrum of the double chiral microena structure was calculated using the COMSOL finite element software. The charge distribution at resonance mode is used to illustrate and explain the core principle of the present invention.
[0038]The material of the first precious metal layer and the second precious metal layer is silver. The transparent medium layer is PMMA. The material of the substrate is a conductive glass and a refractive index is 1.45. The thickness of the first precious metal layer is 60 nm. The length of the first arm of the hole is 260 nm and the width is 80 nm. The second arm of the hole is 320 nm and the width is 80 nm. The L-shaped hole has a period of 600 nm and 600 nm. The transparent medium layer has a thickness of 60 nm. The thickness of the nano rod is the same as the thicknes...
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