Carbon ion source device with reflector power supply
A technology of reflector and source device, which is applied in the direction of circuits, discharge tubes, electrical components, etc., can solve the problems of product yield loss, time-consuming, and arc-starting chamber adjustment, so as to improve the quality of injection and product quality. efficiency, pollution reduction effect
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[0022] The technical solutions in the patent embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the patent embodiments of the present invention. Obviously, the described embodiments are only a part of the patent embodiments of the present invention, not all of them. Example. Based on the embodiments in the patent of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the patent of the present invention.
[0023] The present invention provides an ion source device for a carbon ion implantation process, wherein the ion source for a carbon ion implantation process is a device that ionizes neutral atoms or molecules and generates carbon plasma; the ion source device of the present invention It can reduce the accumulation of carbon and the pollution of impurity ions, and it is convenient to adju...
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