Ultrahigh vacuum pump oil composition

Abstract

The invention discloses an ultrahigh vacuum pump oil composition which comprises the following components in percentage by mass: 0.30-0.50 wt% of zinc dialkyl dithiophosphate, 0.20-0.50 wt% of dialkyl dithiocarbamate, 0.20-0.50 wt% of tris (2, 4, 6-trimethyl-1, 3-pentanediol monoisobutyrate), 0.30-0.50 wt% of trimethyl-1, 3-pentanediol monoisobutyrate, 0.30-0.50 wt% The lubricating oil is prepared from the following components in percentage by weight: 0.30 to 0.60 percent of 2, 4-di-tert-butylphenyl) phosphite ester, 0.1 to 0.2 percent of alkylated phenyl-beta-naphthylamine, 0.02 to 0.04 percent of an anti-rust agent, 0.02 to 0.05 percent of an anti-foaming agent, 0.01 to 0.03 percent of a demulsifying agent, 40 to 60 percent of ester base oil and the balance of ionic liquid. According to the ultrahigh vacuum pump oil composition, the ionic liquid and the ester oil are adopted as base oil, a double-anti-wear system, a double-antioxidant system and the like are compounded, a lubricating oil product suitable for an ultrahigh vacuum pump is formed, and the ultrahigh vacuum pump oil composition has the advantages of extremely low saturated vapor pressure, relatively high air exhaust rate, good high and low temperature performance, good thermal stability and wear resistance, and good lubricating performance. And harsh working condition requirements of ultrahigh vacuum pump equipment such as a molecular pump can be met.

Description

technical field [0001] The invention relates to a lubricating oil composition, in particular to an ultra-high vacuum pump oil composition. Background technique [0002] The vacuum pump is to extract gas molecules from the vacuum chamber, reduce the gas pressure in the vacuum chamber, and substantially achieve the required vacuum degree. Vacuum pump oil is one of the most important raw materials for vacuum pumps. The quality of its oil directly affects the ultimate pressure, pumping rate, back pressure and oil return rate of the equipment. According to the performance characteristics and usage of the pump, the pump is divided into the following categories: [0003] type Ultimate pressure / Pa Main pump type vacuum pump ＜1.33 Single-stage rotary vane pump, reciprocating vacuum pump, etc. medium vacuum pump 0.33--0.01 Two-stage rotary vane pump, oil booster pump, water vapor jet pump, etc. High vacuum pump 0.01--10-6 Cryopumps, sputter ion pu...

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Problems solved by technology

[0007] None of the above-mentioned patent documents involves the application of ionic liquid additive compositions in vacuum pump oil, nor does it involve oil products that meet the requirements of ultra-high vacuum pump equipment, and there are no related reports

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