Multilayer electrode for sensing ph
A multi-layer electrode and sensing layer technology, which is applied in the coating, measuring device, superimposed layer plating, etc., can solve the problem of inapplicability of the pH electrode
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Embodiment 1
[0108] Example 1. Preparation of electrodes
[0109] Cut a 4-inch silicon wafer into 25mm x 25mm pieces. Wafer pellets were then prepared by the sequential steps of sonication in an acetone bath for 15 minutes, sonication in an ethanol bath for 15 minutes, drying under nitrogen, and irradiation with UV light for 15 minutes.
[0110] The silicon wafer dice were then loaded into the magnetron's deposition chamber and the chamber was evacuated overnight to reach 2x10 -6 mbar base pressure. The RuO was then sputtered by RF or DC magnetron using the conditions listed in Table 1. 2 Thin film layers are deposited on the wafer.
[0111] Table 1
[0112]
[0113] Method S5 is the same as S4, except that a mask is used to deposit discontinuous RuO 2 outside the layer. This layer consists of 2μm x 2μm square RuO 2 A square array of blocks covering about 45% of the underlying Si surface.
[0114] Then, using the conditions listed in Table 2, by RF magnetron sputtering, with Ta ...
Embodiment 2
[0122] Example 2. Characterization of Electrodes
[0123] RuO was investigated by scanning electron microscopy and X-ray diffraction 2 Crystallinity of sputter-covered films. The SEM image of the film (Si-S1) deposited at 250°C was observed to be crystalline, whereas the film (Si-S3) deposited at room temperature was observed to be amorphous. This result was confirmed by X-ray diffraction. E.g, Figure 4 The X-ray diffraction pattern depicted in confirms that RuO deposited at 250 °C 2 The thin film (Si-S1) is highly crystalline. RuO by Raman spectroscopy 2 The analysis of the films was consistent with reported literature data.
[0124] RuO was analyzed using XPS 2 and Ta 2 O 5 The chemical composition and chemical state of the surface of the film. Representative spectra of Si-S1 and Si-S1-P1 electrodes are depicted in Figure 5 and Image 6 middle. The spectrum shows that in RuO 2 The surface composition in the film is 2:1 (oxygen to Ru), indicating that the film...
Embodiment 3
[0125] Example 3. With different RuO 2 layer of electrodes
[0126] The pH responsiveness of the membrane-covered electrodes was evaluated in pH buffer solutions with known pH values of 1-10. Figure 7 depicts RuO with a variety of different 2 Plot of electrode potential as a function of pH for Si-S2-P1 electrodes of film thickness. It can be seen that the response is highly linear for film thicknesses of 200, 250 and 300 nm. Extension tests in buffer solutions at pH 2 and 7 showed that the electrodes provided stable potential readings for at least 4.5 months.
[0127] with amorphous RuO 2 The pH response of the layered electrodes (ie Si-S3-P1) was also evaluated in the pH range of 2 to 10. The response is again highly linear with a sensitivity of -50.2mV / pH (R 2 = 0.99).
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