Method for improving adhesive force of AlCrN coating on surface of metal ceramic
A cermet, adhesion technology, applied in the direction of metal material coating process, coating, vacuum evaporation plating, etc., can solve the problem of low adhesion of surface coating, easy peeling of coating, difficulty of cermet surface coating, etc. Problems, to achieve good bonding strength, improve the effect of bonding force
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[0030] A method for improving the adhesion of AlCrN coating on cermet surface. First, the cermet sample was placed in a homogeneous solution of 80mL, 15% methanol solution, 20mL, 37% concentrated hydrochloric acid and 0.2g, 70% ferric chloride, and the reaction was continued for 25min in a closed cell in a constant temperature water bath at 100°C , dissolve the trace metal oxides on the surface of the cermet, and expose the grains on the surface of the sample in a large area.
[0031] The pickled samples were placed in anhydrous ethanol and deionized water for 10 minutes, and then taken out and dried with dry nitrogen.
[0032] Pump the furnace chamber to a background vacuum of 1×10 -3 Pa. First, 200sccm of argon gas was poured into the furnace cavity, and the cermet substrate was etched under -650V bias for 15 minutes; the Cr target was connected to a current of 160A, and 100nm of Cr was deposited on the surface of the sample under -100V bias.
[0033] Then, 200sccm of argo...
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