High-efficiency plate-type ozone generator discharge chamber

Abstract

The invention discloses an efficient plate-type ozone generator discharge chamber, which comprises a plugging plate, an inlet and outlet flange, a buffer chamber, a water path sealing ring, a gas path sealing ring, a gas guide groove and a plurality of ground pole plate units, a first buffer chamber and a second buffer chamber are arranged in each of the plurality of ground pole plate units, and the top of each ground pole plate unit is connected with a front plugging plate. The first buffer chamber and the second buffer chamber are connected through a U-shaped parallel circuit, a multi-channel groove air gap is formed in one side of the first buffer chamber and one side of the second buffer chamber, and a ground pole plate, a ceramic plate and a rubber plate are sequentially arranged at the top of the multi-channel groove air gap. Through the special design of the earth pole plate, the ceramic plate, the rubber plate and the sealing ring, the complete gas path and cooling path design is formed in the discharge chamber, so that the discharge chamber is more compact in structure and simple in interface, each unit is fastened by transverse pressure, the integrity of the gas path and the cooling path is ensured through the linear sealing of the sealing ring, and the hidden danger of leakage is avoided.

Description

technical field [0001] The invention relates to the technical field of gas preparation, in particular to a discharge chamber of a high-efficiency plate-type ozone generator. Background technique [0002] The development of modern industry has led to a sharp increase in the number and types of organic matter entering water, atmosphere and soil, and the pollution is increasing day by day, especially the high-concentration and refractory organic matter, which has the characteristics of complex composition, poor biodegradability, serious pollution and high toxicity. Conventional treatment processes have been difficult to meet the purification requirements. Advanced oxidation technology using high-concentration ozone is the most ideal solution at present. It has a high killing rate and fast speed of other microorganisms, and completely removes pollutants such as organic compounds without causing secondary pollution. It is an "ideal universal green strong oxidizing agent". The use...

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Problems solved by technology

[0003] Studies have shown that the higher the ozone concentration, the more obvious the pollution treatment effect, especially in the fields of silicon wafer cleaning, photoresist removal, atomic layer deposition ALD, molecular beam epitaxy ALE and other processes in semiconductor processing, and medical high-concentration ozone water. The concentration of ozone needs to exceed 20%wt. The current output concentration of ozone generators is usually 7%wt~15%wt, which is difficult to meet the needs of practical applications. Although it is reported that foreign universities have successfully developed ozone with an output concentration of 20.85%wt. Generator, but expensive, complex structure, harsh operating conditions, difficult engineering application;

[0004] The principle of the ozone generator is to use high-voltage discharge technology to ionize oxygen to generate electrochemical reactions, thereby generating ozone. However, ozone is extremely unstable, and its half-life in a standard environment is about 30 minutes. At 100°C, ozone decomposes very violently. When it reaches a high temperature of 270°C, it can be decomposed and converted into oxygen immediately. At present, the most efficient ozone generators use dielectric barrier discharge technology, which has more energy efficiency advantages than UV method and electrolysis method, but Although the dielectric barrier discharge ozone generator works in the low-temperature plasma discharge state, the electron temperature is still close to 9000K, and the discharge electrode is still in a high-temperature state, which accelerates the decomposition of ozone, thereby reducing the effective output concentration of ozone and increasing the unit power consumption of the equipment. The blocking medium of the plate type ozone generator is made of high-purity alumina ceramics, the discharge efficiency is much higher than that of the glass of the tube type ozone generator, the concentration can reach 14%wt, and the energy consumption is 7~9w / g, which is better than that of the tube type ozone generator 10%wt concentration and 9~11w / g energy consumption, as a high energy-consuming device, the operating cost is also the main restrictive condition for the application of ozone generators, so the current ozone generators are insufficient in terms of output concentration and unit power consumption , seriously restricting the engineering application of the ozone generator

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