Preparation method of lanthanum manganese oxide/strontium iridate heterojunction film
A thin film preparation, strontium iridate technology, applied in semiconductor/solid-state device manufacturing, vacuum evaporation coating, coating and other directions, can solve the difficulty of preparing lanthanum manganese oxide/strontium iridate heterojunction, cumbersome and uncontrollable magnetic regulation, etc. problem, to achieve the effect of fast and effective preparation, low production cost and high stability
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[0027] In order to further understand the content of the present invention, the present invention will be described in detail with reference to the accompanying drawings and specific embodiments.
[0028] figure 1 This is a flow chart of the method of the present invention. The preparation process is: pretreating the strontium titanate substrate. The method adopted in this embodiment is as follows: first, at room temperature, the strontium titanate substrate is separately dissolved in acetone and anhydrous ethanol. After ultrasonic cleaning for 5 min, the strontium titanate substrates were ultrasonically cleaned in deionized water and aqua regia for 20 min at 70 °C, respectively. Finally, the treated substrates were annealed at 1000 °C for 2 h in an oxygen atmosphere. Prepare lanthanum manganese oxide and strontium iridate targets respectively, and place the targets in a vacuum chamber for later use.
[0029] Then put the processed substrate into the vacuum chamber, and set t...
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