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Polishing device based on non-Newtonian fluid liquid film shearing mechanism

A non-Newtonian fluid and polishing device technology, applied in the field of ultra-precision polishing, can solve the problems of high cost and poor polishing quality control of polycrystalline hard and brittle materials, and achieve the effect of low device cost, efficient and high-quality polishing, and easy realization

Pending Publication Date: 2022-07-29
ZHEJIANG UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] Aiming at the problems of high cost of current non-contact polishing devices and poor polishing quality control of polycrystalline hard and brittle materials, the present invention proposes a polishing device based on the shearing mechanism of non-Newtonian fluid liquid film, which is characterized by wide application range, High processing efficiency and precision, simple device structure and control, less processing deterioration and damage, and high efficiency and environmental protection

Method used

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  • Polishing device based on non-Newtonian fluid liquid film shearing mechanism
  • Polishing device based on non-Newtonian fluid liquid film shearing mechanism
  • Polishing device based on non-Newtonian fluid liquid film shearing mechanism

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Experimental program
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Effect test

Embodiment 1

[0055] refer to Figure 1~Figure 5 , the workpiece 3 to be processed is a tungsten sheet (diameter Φ50 mm, thickness 1 mm); the surface structured polishing disc 7 is a wedge-shaped disc (the number of grooves is 40), with polyhydroxy aldehyde polymer as the dispersed phase and water as the solvent. A non-Newtonian fluid with shear thickening effect was added, and then alumina abrasive particles with a particle size of 1.0 μm were added and stirred to prepare a non-Newtonian fluid polishing liquid 5; a 3 mm distance was maintained between the workpiece 3 and the surface structured polishing disc 7; polishing At this time, start the drive, adjust the workpiece drive mechanism 1 to 30 r / min, the polishing tool drive mechanism 10 to rotate at 80 r / min, and make the workpiece 3 and the surface structured polishing disc 7 turn in the opposite direction. Due to the relative movement of the workpiece 3 and the surface structured polishing disc 7, the polishing liquid 5 is subjected t...

Embodiment 2

[0057] Taking the polishing fluid as the object, the fluid is modeled by UG software, and the flow field and shear force distribution of the 3D fluid under the liquid film shear polishing are simulated by Fluent software. The surface structure of the polishing disc is wedge-shaped, and the Realizable k-ε turbulence model is used. It is assumed that the distance between the workpiece and the polishing disc is 1 mm, and the given speed is 80 rpm. The solution method adopts the Simple algorithm, the second-order upwind discrete format, and the monitoring residual value is set to 10. -6 . Select two variables of surface structured polishing disc (with / without) and fluid (water / non-Newtonian fluid), and there are four cases in total.

[0058] The flow field distribution in the above four cases. Depend on Figure 12 It can be seen that when the fluid is water, the streamline distribution of the flow field is significantly different when there are polishing discs and those without...

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Abstract

The invention discloses a polishing device based on a non-Newtonian fluid film shearing mechanism, which comprises a workpiece clamping driving device, a polishing disk clamping driving device, a polishing solution pool and a polishing solution circulating system, the polishing solution pool is filled with a polishing solution, and the polishing solution circulating system is connected with the polishing solution pool; a to-be-machined workpiece is arranged at the bottom of the workpiece clamping driving device, a surface structured polishing disc is arranged at the top of the polishing disc clamping driving device, the to-be-machined workpiece is located above the surface structured polishing disc, and the to-be-machined workpiece and the surface structured polishing disc are both located below the liquid level of the polishing liquid pool. And a machining gap exists between the workpiece to be machined and the surface structured polishing disc. The device is low in cost and easy to implement, and the polishing device is simple in overall structure; and efficient and high-quality polishing of the polycrystalline hard and brittle materials can be achieved, and great economic benefits and social benefits are achieved.

Description

technical field [0001] The invention relates to the technical field of ultra-precision polishing, in particular to a polishing device based on a non-Newtonian fluid liquid film shearing mechanism, which is suitable for high-efficiency, high-quality, and low-damage processing of polycrystalline hard and brittle materials. Background technique [0002] Ultra-precision machining technology is the basic technology of product processing in the high-tech field, and plays a vital role in the modernization of national defense science and technology and the construction of the national economy. As the basic technology and an important part of modern high-tech, it promotes the development and progress of semiconductor technology, optoelectronic technology, material science and other technologies. In a sense, ultra-precision machining technology shoulders the important mission of supporting the latest scientific and technological progress, and is also an important symbol for measuring ...

Claims

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Application Information

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IPC IPC(8): B24B1/00B24B29/02B24B41/04B24B57/00
CPCB24B29/02B24B57/00B24B41/04B24B1/00
Inventor 陈泓谕王林吕冰海袁巨龙杭伟王旭彭枫
Owner ZHEJIANG UNIV OF TECH