Sensor, X-ray detector and application thereof
A sensor, X-ray technology, applied in the field of sensors, can solve the problems of stacking, signal crosstalk, low detection efficiency, etc., to achieve the effect of enhancing the signal-to-noise ratio, improving performance, and increasing the area of the sensitive area
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Embodiment 1
[0066] This embodiment provides a sensor, such as figure 1 , figure 2 and image 3 As shown, they are a schematic three-dimensional structure of the sensor, a schematic plan view of the sensor along the XZ plane, and a schematic cross-sectional structure of the sensor along the YZ plane, including a plurality of sensing units 11 and a shielding layer 12, wherein, A plurality of the sensing units 11 are arranged at intervals in the Y direction, and at least one of the sensing units includes a first electrode layer 111 , a sensor layer 112 and a second electrode layer 113 arranged in sequence along the Y direction. An electrode layer 111 includes a plurality of collector electrodes 1111 arranged in sequence along the X direction, the second electrode layer 113 includes at least one cathode 1131, the X direction is perpendicular to the Y direction; the shielding layer 12 is located adjacent to between the two sensing units.
[0067] As an example, the material of the sensor l...
Embodiment 2
[0094] This embodiment provides an X-ray detector, such as Figure 10 and Figure 11 Shown is a schematic three-dimensional structure diagram of a structure of the X-ray detector and a cross-sectional structure diagram of the X-ray detector along the YZ plane, including a sensor 1 and at least one dedicated integrated chip 2, wherein all the The sensor 1 adopts the sensor in the first embodiment, and the dedicated integrated chip 2 is located below the sensor 1 .
[0095] Specifically, the dedicated integrated chip 2 is an integrated circuit chip designed and prepared for the sensor 1 and used to process the signal generated in the sensor 1, and the dedicated integrated chip 2 can be used for energy integration X-ray Signal processing of detectors or photon-counting X-ray detectors.
[0096] As an example, as Figure 12 As shown, it is a schematic plan view of the X-ray detector along the XZ plane, and an adapter plate 21 is provided between the X-ray detector 1 and the ded...
Embodiment 3
[0115] This embodiment provides an application of an X-ray detector, such as Figure 16 and Figure 17 As shown, the system module diagram of the X-ray detector applied to X-ray imaging and the system module diagram of the X-ray detector applied to CT imaging are respectively, the application uses the X-ray detection in the second embodiment The device is used in CT or X-ray imaging.
[0116] Specifically, when the X-ray detector is applied to CT, X-ray imaging or other X-ray imaging equipment, through the arrangement of the collecting electrode 1111 and the drift electrode 1112 in the sensor 1 , it is possible to reduce the amount of time in the device. Signal crosstalk and electrical signal crosstalk caused by the Compton effect during imaging, while enhancing the signal-to-noise ratio, preventing signal stacking, reducing input capacitance, reducing signal waveform width and improving signal uniformity. image quality of the device.
[0117] In the application of the X-ra...
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Abstract
Description
Claims
Application Information
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