Method for preparing vertical anisotropic iron base soft magnetic film

A technology of perpendicular anisotropy and soft magnetic thin film, applied in the application of magnetic film to substrate, magnetic objects, magnetic materials, etc., can solve the problems of complex preparation and high cost, and achieve simple preparation process, low cost and small change Effect

Inactive Publication Date: 2006-04-19
EAST CHINA NORMAL UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Some of the above methods are more complicated to prepare, and the cost is higher, and some require some specific element combinations, which have certain limitations.

Method used

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  • Method for preparing vertical anisotropic iron base soft magnetic film

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0018] The target material is Fe 73.5 Cu 1 Nb 3 Si 13.5 B 9 During sputtering, the argon pressure and flow rate were 1.2Pa and 42ml / min respectively, the power was 120W, the film thickness was 2μm, annealing and heat treatment at 400°C for 30 minutes, and natural cooling under nitrogen atmosphere. The Mössbauer spectrum of the thin film sample is shown in figure 1 , the magnetic moment anisotropy of the thin film samples is mainly perpendicular to the film surface.

Embodiment 2

[0020] The target material is Fe 71 Cu 1 Cr 2 V 4 Si 13 B 9 During sputtering, the argon pressure and flow rate were 1.2Pa and 56ml / min respectively, the power was 200W, the film thickness was 3μm, annealing and heat treatment at 390°C for 20 minutes, and natural cooling in a nitrogen atmosphere under an external magnetic field. The magnetic moment anisotropy of the thin film samples is mainly perpendicular to the film plane.

Embodiment 3

[0022] The target material is Fe 73.5 Cu 1 Nb 3 Si 13.5 B 9 During sputtering, the argon pressure and flow rate were 1.2Pa and 28ml / min respectively, the power was 150W, the film thickness was 2.5μm, annealing and heat treatment at 400°C for 40 minutes, and natural cooling in a nitrogen atmosphere under an external magnetic field. The magnetic moment anisotropy of the thin film samples is mainly perpendicular to the film plane.

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Abstract

A preparation method for a vertical anisotropy iron-base soft-magnetic film is to prepare an iron-base soft-magnetic film on a chip with a RF magnet-control spraying method then to anneal it under spraying method then to anneal it under suitable temperature after the preparation and to cool it without extra outer magnetic field or in the outer magnetic field vertical to the film face to get a vertical anisotropy iron-base soft-magnetic film, among which, the chip is a carrier chip or a silicon chip and the target material is an iron -base soft magnetic alloy.

Description

technical field [0001] The invention relates to a preparation method of a perpendicular anisotropic iron-based soft magnetic thin film, and belongs to the technical field of magnetic material preparation. Background technique [0002] The perpendicular anisotropic iron-based soft magnetic thin film, because the magnetization direction is perpendicular to the film surface, improves the recording density of magnetic recording and reduces the demagnetization factor. It has important application value in the field of high-density perpendicular magnetic recording. At the same time, vertical anisotropy is also a necessary condition for the realization of magneto-optical storage. Finding a new method for preparing vertically anisotropic iron-based soft magnetic films will help promote the development of high-tech fields such as information storage, and may generate huge economic benefits. benefit. [0003] Perpendicular anisotropy is one of the necessary con...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01F41/14H01F1/147G11B5/84H01F41/18
Inventor 袁望治李晓东阮建中赵振杰杨燮龙
Owner EAST CHINA NORMAL UNIV
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