Method for apodizing a planar waveguide grating
A waveguide and planar technology, which is applied in the field of preparing apodized Bragg gratings attached to planar optical waveguides, and in the field of manufacturing optical waveguides with refractive index gratings, which can solve problems such as difficult average refractive index constant
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Embodiment 1
[0060] Silicon wafers were cleaned and then silane treated to form a bond to the acrylate formulation. The treated wafer was spin-coated with a layer of buffer material comprising 75:25 weight percent perfluoropolyether diacrylate (L-9367) / fluorinated tetraacrylate (F60TA), mixed with a photoinitiator. The buffer layer is then partially cured by overall exposure to actinic radiation. Then with 92:8 weight percent fluorinated tetraacrylate (F60TA) / fluoroalkyl acrylate (2,2,3,3,4,4,5,5-octafluorohexane) containing 8 fluorine atoms -1,6-diyl diacrylate), a core material layer mixed with a photoinitiator is spin-coated on the buffer layer. The material is chosen to have a higher refractive index than the buffer layer. The thickness of the core depends on the desired waveguide height, typically in the range of 5 to 9 microns for single mode waveguides. The core material is then exposed to UV light through a mask. The core exposure dose is adjusted to achieve the desired core wi...
Embodiment 2
[0062] A mixture comprising 25 weight percent (wt%) fluorinated tetraacrylate F60TA, 75 wt% fluorinated diacrylate L-9367 mixed with 2 wt% fluorinated photoinitiator formed a homogeneous solution. The solution was then spin-coated on a silicon substrate and heated under a high-pressure mercury lamp at approximately 15 mW / cm 2 The irradiance is cured to form a 10μm thick buffer layer. The refractive index of the buffer layer is 1.313. A core mixture comprising 92 wt% fluorinated tetraacrylate F60TA, 7 wt% fluorinated diacrylate "C6DIACRY" was mixed with 1 wt% photoinitiator Darocure(R) 1173 to form a homogeneous solution. The core solution is then coated on the buffer layer. The core layer was exposed to a mercury-xenon lamp through a photomask and developed to form a 6 μm thick core with a refractive index of 1.336.
[0063] An overcladding composition comprising 99 wt% fluorinated tetraacrylate F60TA and 1 wt% photoinitiator Darocure(R) 1173 was mixed to form a homogeneous...
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