Device for pulling monocrystals

A single crystal and heater technology, applied in the direction of single crystal growth, single crystal growth, post-processing equipment, etc., to achieve the effects of improving uniformity, reducing carbon pollution, and extending service life
CN1656258AInactive Publication Date: 2005-08-17弗拉基米尔・弗拉基米罗维奇・科斯京 +1
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
弗拉基米尔・弗拉基米罗维奇・科斯京
Publication Date
2005-08-17
Estimated Expiration
Not applicable · inactive patent

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Abstract

The device comprises a crucible with a support, a heater and at least one heat-insulating screen, wherein, according to the invention, the heater is made of a starting flexible carbon-bearing material in the form of a cylinder whose ends are fixed between coaxially arranged rigid rings of carbon material that are connected to a power supply. And, the heater is made so that the wall thereof has its thickness determined from the relationship: delta . rho - c = 500 to 8500 J / m<2>. K, where: <> delta - heater wall thickness, m; rho - density of the material the heater is made of, kg / m<3>; and c - specific heat of the material the heater is made of (at working temperature), J / kg.K.
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Description

technical field

[0001] The invention relates to the field of semiconductor metallurgy and can be used to grow silicon, germanium and A III B V single crystals of group compounds. technical background

[0002] The device for growing single crystal in the prior art includes a melting crucible mounted on a support, a heater with wires and a heat insulation system surrounding it, wherein the support, heater and heat insulation system are made of carbon materials. [Russian Patent No. 2081948, C30B15 / 14, published June 20, 1997; and Russian Patent No. 2097451, C30B15 / 14, published November 27, 1997].

[0003] In the process of pulling a single crystal using these devices, a heater with vertical grooves is used. The heater has a large mass, which increases heat loss and causes severe hysteresis effects in heating and cooling, which in turn affect process control. The grooves in the heater and the inhomogeneous current flow through the different cross-sections disturb the unifor...

Claims

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