Multi-sectional-distribution feedback semiconductor laser
A distributed feedback and laser technology, which is applied to semiconductor lasers, lasers, laser components, etc., can solve the problems of low yield, high cost, and inability to fine-tune repairs, etc., and achieve high yield and low cost.
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Embodiment 1
[0025] [Example 1] InGaAsP / InP variable waveguide width multi-segment DFB laser with operating wavelength in the 1550nm band.
[0026] The epitaxial material of the device is described below. First, an epitaxial, n-type InP buffer layer (thickness 200nm, doping concentration about 1×10 18 cm -2 ), 100nm thick undoped lattice matching InGaAsP waveguide layer (optical fluorescence wavelength 1.2 microns), strained InGaAsP multiple quantum wells (optical fluorescence wavelength 1.52 microns, 7 quantum wells: well width 8nm, 0.5% compressive strain, barrier width 10nm , lattice matching material, optical fluorescence wavelength 1.2 microns), 70nm thick InGaAsP grating material layer. Next, the grating structure is fabricated by the method of holographic interference exposure. Then secondary epitaxy 100nm thick p-type lattice matched InGaAsP waveguide layer (optical fluorescence wavelength 1.2 μm, doping concentration about 1×10 17 cm -2 ), 1.7 μm thick P-type InP confinement ...
Embodiment 2
[0029] [Example 2] A variable waveguide width multi-segment DFB laser with a working wavelength in the 1550nm band introduced into the phase modulation segment.
[0030] The epitaxial material of the device is described below. First, an n-type InP buffer layer (thickness 200nm, doping concentration about 1×10) is epitaxially on the n-type substrate material 18 cm -2 ), 100nm thick undoped lattice matching InGaAsP waveguide layer (optical fluorescence wavelength 1.2 microns), strained InGaAsP multiple quantum wells (optical fluorescence wavelength 1.52 microns, 7 quantum wells: well width 8nm, 0.5% compressive strain, barrier width 10nm , lattice matching material, optical fluorescence wavelength 1.2 microns), 70nm thick InGaAsP grating material layer. Next, the grating structure is fabricated by holographic interference exposure, and the grating in the phase adjustment section area and the quantum well layer below are removed by photolithography and wet etching. Then the se...
Embodiment 3
[0033] [Example 3] A variable waveguide width multi-segment DFB laser with a phase modulation segment based on a side-coupling grating with a working wavelength in the 1550 nm band.
[0034] The epitaxial material of the device is formed on the n-type substrate material by one epitaxy, including the n-type InP buffer layer (thickness 200nm, doping concentration about 1×10 18 cm -2 ), 100nm thick undoped lattice matching InGaAsP waveguide layer (optical fluorescence wavelength 1.2 microns), strained InGaAsP multiple quantum wells (optical fluorescence wavelength 1.52 microns, 7 quantum wells: well width 8nm, 0.5% compressive strain, barrier width 10nm , lattice matching material, optical fluorescence wavelength 1.2 μm), 100nm thick p-type lattice matching InGaAsP waveguide layer (optical fluorescence wavelength 1.2 μm, doping concentration about 1×10 17 cm -2 ), 1.7 μm thick P-type InP confinement layer (doping concentration from 3×10 17 cm -2 Gradually change to 1×10 18 c...
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Abstract
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